A 2-DOF piezoelectric platform for cross-scale semiconductor inspection
To address the challenge of achieving extensive travel and high precision in semiconductor
inspection, this study proposes a novel 2-DOF cross-scale piezoelectric positioning platform …
inspection, this study proposes a novel 2-DOF cross-scale piezoelectric positioning platform …
An asynchronous dual-foot inertial piezoelectric actuator with strong magnetic compatibility
To address the limitations in actuator selection within strong magnetic environments, this
study introduces a novel inertial piezoelectric actuator with asynchronous dual-foot motion …
study introduces a novel inertial piezoelectric actuator with asynchronous dual-foot motion …
Investigation of a cascaded piezoelectric transducer with cone horn for multi-mode power ultrasound application
G Li, M Lei, X Zhang, Y Zeng, S Tang, J Shi… - Physica Scripta, 2024 - iopscience.iop.org
To meet the ultrasonic application requirement of high power intensity and large mechanical
displacement, a new theoretical method is used to study the multi-mode characteristic of the …
displacement, a new theoretical method is used to study the multi-mode characteristic of the …