Si-based MEMS resonant sensor: A review from microfabrication perspective
With the technological advancement in micro-electro-mechanical systems (MEMS),
microfabrication processes along with digital electronics together have opened novel …
microfabrication processes along with digital electronics together have opened novel …
State-of-the-art in mode-localized MEMS coupled resonant sensors: A comprehensive review
V Pachkawade - IEEE Sensors Journal, 2021 - ieeexplore.ieee.org
This article reviews the investigation of the mode-localized microelectromechanical system
(MEMS) coupled resonant sensors. This class of a sensor features a new approach in the …
(MEMS) coupled resonant sensors. This class of a sensor features a new approach in the …
Review of cutting-edge sensing technologies for urban underground construction
An accurate understanding of infrastructure performance is beneficial for averting potentially
severe accidents during construction because the increasing development of urban …
severe accidents during construction because the increasing development of urban …
Screen-printed strain gauge for micro-strain detection applications
A printed strain gauge based on metal/non-metal composite was successfully fabricated and
tested for micro-strain (με) detection. A silver ink was blended with a carbon ink to achieve a …
tested for micro-strain (με) detection. A silver ink was blended with a carbon ink to achieve a …
Voltage‐and Metal‐assisted Chemical Etching of Micro and Nano Structures in Silicon: A Comprehensive Review
S Surdo, G Barillaro - Small, 2024 - Wiley Online Library
Sculpting silicon at the micro and nano scales has been game‐changing to mold bulk silicon
properties and expand, in turn, applications of silicon beyond electronics, namely, in …
properties and expand, in turn, applications of silicon beyond electronics, namely, in …
Infrastructure sensing
K Soga, J Schooling - Interface focus, 2016 - royalsocietypublishing.org
Design, construction, maintenance and upgrading of civil engineering infrastructure requires
fresh thinking to minimize use of materials, energy and labour. This can only be achieved by …
fresh thinking to minimize use of materials, energy and labour. This can only be achieved by …
Highly sensitive screen printed strain gauge for micro-strain detection
In this paper a flexible and stretchable strain gauge was screen printed and tested for micro-
strain detection. The strain gauge was fabricated by screen printing carbon ink on …
strain detection. The strain gauge was fabricated by screen printing carbon ink on …
MEMS sensor for detection and measurement of ultra-fine particles
V Pachkawade, Z Tse - Engineering Research Express, 2022 - iopscience.iop.org
This paper investigates the performance of the micro-electro-mechanical systems resonant
sensor used for particle detection and concentration measurement. The fine and ultra-fine …
sensor used for particle detection and concentration measurement. The fine and ultra-fine …
Measurement of residual stress and Young's modulus on micromachined monocrystalline 3C-SiC layers grown on< 111> and< 100> silicon
3C-SiC is an emerging material for MEMS systems thanks to its outstanding mechanical
properties (high Young's modulus and low density) that allow the device to be operated for a …
properties (high Young's modulus and low density) that allow the device to be operated for a …
Vacuum packaged low-power resonant MEMS strain sensor
This paper describes a technical approach toward the realization of a low-power
temperature-compensated micromachined resonant strain sensor. The sensor design is …
temperature-compensated micromachined resonant strain sensor. The sensor design is …