[HTML][HTML] Temperature frequency stability study of extensional mode N-doped silicon MEMS resonator
Analytical and numerical modeling techniques are presented to predict n-type-doped silicon
resonators' temperature coefficient frequencies for the extensional mode of vibration by …
resonators' temperature coefficient frequencies for the extensional mode of vibration by …
Design and development of a MEMS butterfly resonator using synchronizing beam and out of plane actuation
N Khan, MJ Ahamed - Microsystem Technologies, 2020 - Springer
This paper presents beam modeling techniques for maximizing mechanical sensitivity of a
butterfly resonator for gyroscopic applications. We investigate the geometric aspects of …
butterfly resonator for gyroscopic applications. We investigate the geometric aspects of …
A Novel High Q Lamé-Mode Bulk Resonator with Low Bias Voltage
T Wang, Z Chen, Q Jia, Q Yuan, J Yang, F Yang - Micromachines, 2020 - mdpi.com
This work reports a novel silicon on insulator (SOI)-based high quality factor (Q factor) Lamé-
mode bulk resonator which can be driven into vibration by a bias voltage as low as 3 V. A …
mode bulk resonator which can be driven into vibration by a bias voltage as low as 3 V. A …
Modeling of nonlinear dynamics and temperature stability of doped silicon microresonators
Silicon is widely used as the device material for many micro resonators applied in timing and
frequency referencing. One key disadvantage of silicon resonators compared to quartz …
frequency referencing. One key disadvantage of silicon resonators compared to quartz …