Advancements of uncooled infrared microbolometer materials: A review
In this review, we have comprehensively elaborated on the various materials suitable for the
infrared (IR) bolometer applications and also provided the underlying mechanisms of …
infrared (IR) bolometer applications and also provided the underlying mechanisms of …
Integrating mems and ics
The majority of microelectromechanical system (MEMS) devices must be combined with
integrated circuits (ICs) for operation in larger electronic systems. While MEMS transducers …
integrated circuits (ICs) for operation in larger electronic systems. While MEMS transducers …
From the casimir limit to phononic crystals: 20 years of phonon transport studies using silicon-on-insulator technology
AM Marconnet, M Asheghi… - Journal of heat …, 2013 - asmedigitalcollection.asme.org
Silicon-on-insulator (SOI) technology has sparked advances in semiconductor and MEMs
manufacturing and revolutionized our ability to study phonon transport phenomena by …
manufacturing and revolutionized our ability to study phonon transport phenomena by …
Thermal sensors for contactless temperature measurements, occupancy detection, and automatic operation of appliances during the COVID-19 pandemic: A review
The worldwide spread of COVID-19 has forced us to adapt to a new way of life made of
social distancing, avoidance of physical contact and temperature checks before entering …
social distancing, avoidance of physical contact and temperature checks before entering …
Carbon nanotube-based uncooled bolometers: advances and progress
Discovery of infrared radiation (IR) was an important step in understanding the hidden
secrets of nature, which could be unraveled only after “seeing” this invisible spectrum. This …
secrets of nature, which could be unraveled only after “seeing” this invisible spectrum. This …
Microfabricated thermally isolated low work-function emitter
JH Lee, I Bargatin, BK Vancil, TO Gwinn… - Journal of …, 2014 - ieeexplore.ieee.org
In this paper, we report low work function mechanically and thermally robust microfabricated
thermionic emitters. Conformal deposition of polycrystalline-silicon carbide (poly-SiC) was …
thermionic emitters. Conformal deposition of polycrystalline-silicon carbide (poly-SiC) was …
Multiphysics simulation of hypersensitive microbolometer sensor using vanadium dioxide and air suspension for millimeter wave imaging
A highly sensitive uncooled antenna-coupled microbolometer for millimeter wave (mmW)
imaging is reported in this paper. Vanadium dioxide (VO 2) phase-change material is …
imaging is reported in this paper. Vanadium dioxide (VO 2) phase-change material is …
Fabrication of microbolometer arrays based on polymorphous silicon–germanium
This work reports the development of arrays of infrared sensors (microbolometers) using a
hydrogenated polymorphous silicon–germanium alloy (pm-SixGe1-x: H). Basically …
hydrogenated polymorphous silicon–germanium alloy (pm-SixGe1-x: H). Basically …
Spray coating of two-dimensional suspended film of vanadium oxide-coated carbon nanotubes for fabrication of a large volume infrared bolometer
A novel spray coating and transfer method is developed for fabricating a suspended
bolometer of vanadium oxide-coated multiwalled carbon nanotubes (VCNTs). A parametric …
bolometer of vanadium oxide-coated multiwalled carbon nanotubes (VCNTs). A parametric …
New avenues for residual stress analysis in ultrathin atomic layer deposited free-standing membranes through release of micro-cantilevers
S Burgmann, MJ Lid, HJD Johnsen, NP Vedvik… - Heliyon, 2024 - cell.com
The fabrication of thinnest, yet undeformed membrane structures with nanometer resolution
is a prerequisite for a variety of Microelectromechanical systems (MEMS). However …
is a prerequisite for a variety of Microelectromechanical systems (MEMS). However …