Physical vapour deposition of Zr-based nano films on various substrates: a review
AHJ Tarek, CW Lai, BA Razak… - Current …, 2022 - ingentaconnect.com
Physical vapor deposition (PVD) is a thin film fabrication process in the semiconductor
industry. This review paper discusses the different types of PVD methods such as sputtering …
industry. This review paper discusses the different types of PVD methods such as sputtering …
Studies on group IV and V valve metal corrosion in acidic fluoride media
Abstract Dissolution rates of Ti, Zr, Nb and Ta in acidic fluoride media of different
concentrations at various temperatures were measured by weight loss method, and were …
concentrations at various temperatures were measured by weight loss method, and were …