Si-based MEMS resonant sensor: A review from microfabrication perspective

G Verma, K Mondal, A Gupta - Microelectronics Journal, 2021 - Elsevier
With the technological advancement in micro-electro-mechanical systems (MEMS),
microfabrication processes along with digital electronics together have opened novel …

Nanomechanical modeling of the bending response of silicon nanowires

S Zare Pakzad, M Nasr Esfahani… - ACS Applied Nano …, 2023 - ACS Publications
Understanding the mechanical behavior of silicon nanowires is essential for the
implementation of advanced nanoscale devices. Although bending tests are predominantly …

Effect of native oxide on stress in silicon nanowires: Implications for nanoelectromechanical systems

M Nasr Esfahani, S Zare Pakzad, T Li… - ACS Applied Nano …, 2022 - ACS Publications
Understanding the origins of intrinsic stress in Si nanowires (NWs) is crucial for their
successful utilization as transducer building blocks in next-generation, miniaturized sensors …

Simplified top-down fabrication of sub-micron silicon nanowires

SZ Pakzad, S Akinci… - Semiconductor …, 2023 - iopscience.iop.org
Silicon nanowires are among the most promising nanotechnology building blocks in
innovative devices with numerous applications as nanoelectromechanical systems …

Multiscale Fabrication and Characterization of a NEMS Force Sensor

M Jedari Ghourichaei, U Kerimzade… - Advanced Materials …, 2024 - Wiley Online Library
This study investigates the fabrication and characterization of an innovative
nanoelectromechanical system force sensor that utilizes suspended submicron silicon …

Comparing empirical interatomic potentials to modeling silicon surface stress

MN Esfahani - Solid State Communications, 2022 - Elsevier
This study compares six widely used classical many-body potentials–Tersoff-T3, Stillinger–
Weber, modified Tersoff, optimized modified Tersoff, environment-dependent interatomic …

Observation of coupled mechanical resonance modes within suspended 3D nanowire arrays

Y Kilinc, MÇ Karakan, Y Leblebici, MS Hanay… - Nanoscale, 2020 - pubs.rsc.org
Complex yet compact nanoscale mechanisms have largely been absent due to the rather
limited availability of components and integration techniques. Especially missing have been …

Surface stress effects on the mechanical properties of silicon nanowires: a molecular dynamics simulation

M Nasr Esfahani - Journal of Applied Physics, 2019 - pubs.aip.org
A primary challenge to use silicon nanowires as a truly potential building block in nanoscale
devices is the implementation of scale effects into operational performance. Therefore …

Non-linear Raman shift-stress behavior in top-down fabricated highly strained silicon nanowires

LB Spejo, JL Arrieta-Concha… - Journal of Applied …, 2020 - pubs.aip.org
Strain engineering is a key technology to continue Moore's law with silicon or any other
foreseen semiconductor in very large scale integration. The characterization of strain in …

Characterization of the piezoresistive effects of silicon nanowires

S Jang, J Sung, B Chang, T Kim, H Ko, K Koo, D Cho - Sensors, 2018 - mdpi.com
Silicon nanowires (SiNWs) have received attention in recent years due to their anomalous
piezoresistive (PZR) effects. Although the PZR effects of SiNWs have been extensively …