Si-based MEMS resonant sensor: A review from microfabrication perspective
With the technological advancement in micro-electro-mechanical systems (MEMS),
microfabrication processes along with digital electronics together have opened novel …
microfabrication processes along with digital electronics together have opened novel …
Nanomechanical modeling of the bending response of silicon nanowires
S Zare Pakzad, M Nasr Esfahani… - ACS Applied Nano …, 2023 - ACS Publications
Understanding the mechanical behavior of silicon nanowires is essential for the
implementation of advanced nanoscale devices. Although bending tests are predominantly …
implementation of advanced nanoscale devices. Although bending tests are predominantly …
Effect of native oxide on stress in silicon nanowires: Implications for nanoelectromechanical systems
M Nasr Esfahani, S Zare Pakzad, T Li… - ACS Applied Nano …, 2022 - ACS Publications
Understanding the origins of intrinsic stress in Si nanowires (NWs) is crucial for their
successful utilization as transducer building blocks in next-generation, miniaturized sensors …
successful utilization as transducer building blocks in next-generation, miniaturized sensors …
Simplified top-down fabrication of sub-micron silicon nanowires
SZ Pakzad, S Akinci… - Semiconductor …, 2023 - iopscience.iop.org
Silicon nanowires are among the most promising nanotechnology building blocks in
innovative devices with numerous applications as nanoelectromechanical systems …
innovative devices with numerous applications as nanoelectromechanical systems …
Multiscale Fabrication and Characterization of a NEMS Force Sensor
M Jedari Ghourichaei, U Kerimzade… - Advanced Materials …, 2024 - Wiley Online Library
This study investigates the fabrication and characterization of an innovative
nanoelectromechanical system force sensor that utilizes suspended submicron silicon …
nanoelectromechanical system force sensor that utilizes suspended submicron silicon …
Comparing empirical interatomic potentials to modeling silicon surface stress
MN Esfahani - Solid State Communications, 2022 - Elsevier
This study compares six widely used classical many-body potentials–Tersoff-T3, Stillinger–
Weber, modified Tersoff, optimized modified Tersoff, environment-dependent interatomic …
Weber, modified Tersoff, optimized modified Tersoff, environment-dependent interatomic …
Observation of coupled mechanical resonance modes within suspended 3D nanowire arrays
Complex yet compact nanoscale mechanisms have largely been absent due to the rather
limited availability of components and integration techniques. Especially missing have been …
limited availability of components and integration techniques. Especially missing have been …
Surface stress effects on the mechanical properties of silicon nanowires: a molecular dynamics simulation
M Nasr Esfahani - Journal of Applied Physics, 2019 - pubs.aip.org
A primary challenge to use silicon nanowires as a truly potential building block in nanoscale
devices is the implementation of scale effects into operational performance. Therefore …
devices is the implementation of scale effects into operational performance. Therefore …
Non-linear Raman shift-stress behavior in top-down fabricated highly strained silicon nanowires
LB Spejo, JL Arrieta-Concha… - Journal of Applied …, 2020 - pubs.aip.org
Strain engineering is a key technology to continue Moore's law with silicon or any other
foreseen semiconductor in very large scale integration. The characterization of strain in …
foreseen semiconductor in very large scale integration. The characterization of strain in …
Characterization of the piezoresistive effects of silicon nanowires
Silicon nanowires (SiNWs) have received attention in recent years due to their anomalous
piezoresistive (PZR) effects. Although the PZR effects of SiNWs have been extensively …
piezoresistive (PZR) effects. Although the PZR effects of SiNWs have been extensively …