Emerging trends in wide band gap semiconductors (SiC and GaN) technology for power devices

F Roccaforte, P Fiorenza, G Greco, RL Nigro… - Microelectronic …, 2018 - Elsevier
Among the wide band gap (WBG) semiconductors, silicon carbide (4H-SiC) and gallium
nitride (GaN) are nowadays recognized as outstanding materials for the future of power …

Selective doping in silicon carbide power devices

F Roccaforte, P Fiorenza, M Vivona, G Greco… - Materials, 2021 - mdpi.com
Silicon carbide (SiC) is the most mature wide band-gap semiconductor and is currently
employed for the fabrication of high-efficiency power electronic devices, such as diodes and …

Ion implantation doping in silicon carbide and gallium nitride electronic devices

F Roccaforte, F Giannazzo, G Greco - Micro, 2022 - mdpi.com
Wide band gap semiconductors such as silicon carbide (SiC) and gallium nitride (GaN) are
excellent materials for the next generation of high-power and high-frequency electronic …

A critical review of theory and progress in Ohmic contacts to p-type SiC

L Huang, M Xia, X Gu - Journal of Crystal Growth, 2020 - Elsevier
Silicon carbide (SiC) is a promising candidate in high-temperature, high-frequency and high-
power applications due to its outstanding properties such as wide band gap, high critical …

Electrical and structural properties of surfaces and interfaces in Ti/Al/Ni Ohmic contacts to p-type implanted 4H-SiC

M Vivona, G Greco, C Bongiorno, RL Nigro… - Applied Surface …, 2017 - Elsevier
In this work, the electrical and structural properties of Ti/Al/Ni Ohmic contacts to p-type
implanted silicon carbide (4H-SiC) were studied employing different techniques. With …

In-situ near-ambient-pressure photoelectron spectroscopy investigations of high-work-function MoO3 on 4H-SiC (0001)

L Peize, L Xu, G Jian, D Sisheng, D Yishui, N Yuxiang… - Surface Science, 2023 - Elsevier
How to realize effective Ohmic contact to SiC represents one of the major challenges for
high-power and high-frequency SiC electronics. Forming a high-work-function interfacial …

Ohmic contacts on p-Type Al-Implanted 4H-SiC layers after different post-implantation annealings

M Spera, G Greco, D Corso, S Di Franco, A Severino… - Materials, 2019 - mdpi.com
This paper reports on the electrical activation and Ohmic contact properties on p-type Al-
implanted silicon carbide (4H-SiC). In particular, the contacts were formed on 4H-SiC …

Metal/semiconductor contacts to silicon carbide: Physics and technology

F Roccaforte, M Vivona, G Greco, R Lo Nigro… - Materials Science …, 2018 - Trans Tech Publ
The physics and technology of metal/semiconductor interfaces are key-points in the
development of silicon carbide (SiC) based devices. Although in the last decade, the metal …

Long-term stability of nickel-based ohmic contacts with n-type and p-type 4H-SiC in a high-temperature environment

M Masunaga, V Crescitelli… - Japanese Journal of …, 2020 - iopscience.iop.org
Long-term thermal stability of specific contact resistance (ρ c) in cross-bridge Kelvin resistors
(CBKRs), with an Al/TiN/Ti/Ni 2 Si/4H-SiC layered structure, was studied. In high …

Gold-free contacts on AlxGa1-xN/GaN high electron mobility transistor structure grown on a 200-mm diameter Si (111) substrate

WH Tham, DS Ang, LK Bera, SB Dolmanan… - Journal of Vacuum …, 2016 - pubs.aip.org
The authors report on the fabrication and characterization of low-temperature processed
gold-free Ohmic contacts for Al x Ga 1− x N/GaN high electron mobility transistors (HEMTs) …