Model-free adaptive iterative learning control method for the Czochralski silicon monocrystalline batch process

JC Ren, D Liu, Y Wan - IEEE Transactions on Semiconductor …, 2021 - ieeexplore.ieee.org
Model-based control methods do not produce satisfactory control results with the batch
process control of Czochralski (CZ) silicon monocrystalline with complex nonlinearity, large …

Modeling and application of Czochralski silicon single crystal growth process using hybrid model of data-driven and mechanism-based methodologies

JC Ren, D Liu, Y Wan - Journal of Process Control, 2021 - Elsevier
Czochralski (Cz) silicon single crystal growth process is a large delay, nonlinear dynamic
time-varying system with complex physicochemical reactions, multi-field and multi-phase …

[PDF][PDF] A review of the automation of the Czochralski crystal growth process

J Winkler, M Neubert, J Rudolph - Acta Physica Polonica A, 2013 - bibliotekanauki.pl
On the occasion of the centennial of the invention of the Czochralski crystal growth process
by the Polish scientist Jan Czochralski, a review of selected strategies for the automatic …

Data-driven and mechanism-based hybrid model for semiconductor silicon monocrystalline quality prediction in the czochralski process

JC Ren, D Liu, Y Wan - IEEE Transactions on Semiconductor …, 2022 - ieeexplore.ieee.org
The Czochralski (CZ) process is the core technology for producing semiconductor silicon
monocrystalline (SMC), and it is a complex batch process. However, the crystal growth rate …

Nonlinear generalized predictive control of the crystal diameter in CZ-Si crystal growth process based on stacked sparse autoencoder

D Liu, N Zhang, L Jiang, XG Zhao… - IEEE Transactions on …, 2019 - ieeexplore.ieee.org
A new control structure with constant pulling speed for growing high-quality crystal in the
Czochralski (CZ) method is presented in this brief. In this control structure, the pulling speed …

A first-principle model of 300 mm Czochralski single-crystal Si production process for predicting crystal radius and crystal growth rate

Z Zheng, T Seto, S Kim, M Kano, T Fujiwara… - Journal of Crystal …, 2018 - Elsevier
The Czochralski (CZ) process is the dominant method for manufacturing large cylindrical
single-crystal ingots for the electronics industry. Although many models and control methods …

Data-driven model predictive control of Cz silicon single crystal growth process with V/G value soft measurement model

Y Wan, D Liu, CC Liu, JC Ren - IEEE Transactions on …, 2021 - ieeexplore.ieee.org
The growth process of Czochralski (Cz) silicon single crystal is a dynamic time-varying
system with nonlinearity, strong coupling, large hysteresis, and uncertain model. Traditional …

Crystal shape 2D modeling for transient CZ silicon crystal growth

A Sabanskis, K Bergfelds, A Muiznieks, T Schröck… - Journal of Crystal …, 2013 - Elsevier
A non-stationary axisymmetric model of Czochralski silicon single crystal growth is
presented. The model describes transient behavior of crystal–melt, melt–gas and crystal …

Run-To-Run control of the Czochralski process

P Rahmanpour, S Sælid, M Hovd - Computers & Chemical Engineering, 2017 - Elsevier
Commercially, the Czochralski process plays a key role in production of monocrystalline
silicon for semiconductor and solar cell applications. However, it is a highly complex batch …

Optimal control of SiC crystal growth in the RF-TSSG system using reinforcement learning

L Wang, A Sekimoto, Y Takehara, Y Okano, T Ujihara… - Crystals, 2020 - mdpi.com
We have developed a reinforcement learning (RL) model to control the melt flow in the radio
frequency (RF) top-seeded solution growth (TSSG) process for growing more uniform SiC …