This is the second of a three-part series on micro-electromechanical systems (MEMS)
sensor technology. In the first part, a general introduction to MEMS sensing was given …

Piezoelectric devices with integrated actuation and sensing capabilities are often used for
the development of electromechanical systems. The present paper addresses …

In this study, residual stress influences on the vibrational behavior of piezoelectric circular
microdiaphragm-based biosensors are investigated theoretically and experimentally. The …

In this work, we present an investigation into the 2: 1 internal resonance and saturation
phenomena in a compound micromachined U-shaped portal frame MEMS device and its …

Semiconductor fabs are large, complex industrial sites with costs for a single facility
approaching $10 B. In this paper we discuss the possibility of putting the entire functionality …

This work reports on the design, fabrication and characterization of a piezoelectrically
actuated mass sensor. The sensor utilizes degenerate resonant modes in which one mode …

In this work, the authors focus on a method to fabricate arbitrary shaped free standing
membranes with a thickness less than 20 nm, produced from different polymers with the help …

This paper describes a one-port mechanical resonance detection scheme utilized on a
piezoelectric thin film driven silicon circular diaphragm resonator and discusses the …

To solve the problem of thermoacoustic (TA) loudspeakers not being able to achieve high
sound pressure level (SPL) at low driving voltages, a sandwich MXene/reduced oxide …

Thin-film silicon micro resonators are fabricated by surface micromachining at temperatures
that are CMOS and large area substrate-compatible. Disk resonators offer large working …