MEMS technology and applications have grown at a tremendous pace, while structural
dimensions have grown smaller and smaller, reaching down even to the molecular level …

Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to
provide the most complete MEMS coverage available. Thoroughly revised and updated the …

The recent shift in focus from defense and government work to commercial wireless efforts
has caused the job of the typical microwave engineer to change dramatically. The modern …

The silicon age that led the computer revolution has significantly changed the world. The
next 30 years will see the incorporation of new types of functionality onto the chip-structures …

Unlike IC packaging, MEMS dice must interface with the environment for sensing,
interconnection, and/or actuation. MEMS packaging is application specific and the package …

The packaging of Micro-Electro-Mechanical Systems (MEMS) is a field of great importance
to anyone using or manufacturing sensors, consumer products, or military applications …

From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications
details manufacturing techniques applicable to bionanotechnology. After reviewing MEMS …

This book is motivated by the need to understand and predict the complex stress
distributions, transfer mechanisms, warpage, and potential failures arising from the …

Multichip module (MCM) packaging provides an efficient solution to integration of MEMS
with microelectronics. In this paper, new methods of packaging MEMS using two advanced …

From computers to aeronautics, many industries have achieved great cost savings through
the use of modular engineering approaches. In standardizing interfaces between elements …