A review on effect of various high-k dielectric materials on the performance of FinFET device

J Kumar, S Birla, G Agarwal - Materials Today: Proceedings, 2023 - Elsevier
The scalability of bulk CMOS faced various possible issues due to inherent material and
process innovation constraints. Alternatively, transistor devices with supplementary gates …

[HTML][HTML] Comprehensive Review of FinFET Technology: History, Structure, Challenges, Innovations, and Emerging Sensing Applications

K Karimi, A Fardoost, M Javanmard - Micromachines, 2024 - mdpi.com
The surge in demand for 3D MOSFETs, such as FinFETs, driven by recent technological
advances, is explored in this review. FinFETs, positioned as promising alternatives to bulk …

Performance reliability of ultra-thin Si-SiO2, Si-Al2O3, Si-ZrO2 and Si-HfO2 interface in rectangular steep retrograded nano-regimes devices

RR Thakur, P Singh - Microelectronics Reliability, 2019 - Elsevier
Abstracts Due to continuous rapid miniaturization of the MOSFET based Integrated Circuits;
it is becoming difficult to suppress the gate leakage at the oxide-silicon interface using …

White X-Ray Radiation Effects in MOS Capacitors With Atomic Layer Deposited HfO2/Al2O3 and Al2O3/HfO2/Al2O3 Gate Dielectric Stacks for High Total …

H Zhao, Z Zheng, H Zhu, L Wang, B Li… - … on Device and …, 2023 - ieeexplore.ieee.org
White x-ray radiation effects in metal-oxide-semiconductor (MOS) capacitors with
HfO2/Al2O3 (H/A) two-layer and Al2O3/HfO2/Al2O3 (A/H/A) three-layer gate dielectric stacks …

Analysis of interface trap charges and densities using capacitance-voltage (CV) and conductance voltage (GV) methods in steep retrograded Al2O3, ZrO2 and HfO2 …

RR Thakur, P Singh - AIP Conference Proceedings, 2018 - pubs.aip.org
In this paper, a simulation study has been carried out to determine the effects of different
gate oxide on the electrical performance of a Silicon channel steep retrograded doped n …

Investigation of Leakage Parameters of Hafnium Silicate (HfSiO4) Based Nano-Scale MOS Circuits

J Ahmad - 2020 - search.proquest.com
Abstract High-k based Metal Oxide Semiconductor (MOS) capacitors are readily used in next
generation nano scaled Complementary Metal Oxide Semiconductor (CMOS) circuits. These …