The static and dynamic behavior of MEMS arch resonators near veering and the impact of initial shapes

AZ Hajjaj, N Alcheikh, MI Younis - International Journal of Non-Linear …, 2017 - Elsevier
We investigate experimentally and analytically the effect of initial shapes, arc and cosine
wave, on the static and dynamic behavior of microelectromechanical systems (MEMS) arch …

On the snap-through buckling analysis of electrostatic shallow arch micro-actuator via meshless Galerkin decomposition technique

HM Ouakad, KK Żur - Engineering Analysis with Boundary Elements, 2022 - Elsevier
Micromechanical systems (MEMS) based on electrostatic actuators are commonly involved
in driving and actuating high-speed micro-structures. For this to be efficient, these micro …

A double-side electrically-actuated arch microbeam for pressure sensing applications

F Najar, M Ghommem, A Abdelkefi - International Journal of Mechanical …, 2020 - Elsevier
In this study, we consider a pressure sensor whose main component is a clamped-clamped
shallow arched microbeam. Two fixed electrodes are used to actuate the microbeam in the …

Experimental investigation and theoretical modelling on nonlinear dynamics of cantilevered microbeams

Z Li, Y He, B Zhang, J Lei, S Guo, D Liu - European Journal of Mechanics-A …, 2019 - Elsevier
The nonlinear vibration of cantilever nickel microbeams with thickness in micron level is
investigated through experiment and theory. A non-contact dynamic vibration measurement …

Arch microbeam bifurcation gas sensors

F Najar, M Ghommem, E Abdel-Rahman - Nonlinear Dynamics, 2021 - Springer
We investigate the potential of electrostatic initially curved microbeams to serve as
bifurcation gas sensors. Toward that end, we develop static and dynamic reduced-order …

Novel threshold pressure sensors based on nonlinear dynamics of MEMS resonators

MH Hasan, FM Alsaleem… - … of Micromechanics and …, 2018 - iopscience.iop.org
Triggering an alarm in a car for low air-pressure in the tire or tripping an HVAC compressor if
the refrigerant pressure is lower than a threshold value are examples for applications where …

Lateral pull-in instability of electrostatic MEMS transducers employing repulsive force

M Daeichin, R Miles, S Towfighian - Nonlinear Dynamics, 2020 - Springer
We report on the lateral pull-in in capacitive MEMS transducers that employ a repulsive
electrostatic force. The moving element in this system undergoes motion in two dimensions …

A fully compliant tristable mechanism employing both tensural and compresural segments

G Chen, Q Han, K Jin - Journal of Mechanisms and …, 2020 - asmedigitalcollection.asme.org
A multistable compliant mechanism is a device that can hold several distinct positions
through the storage and release of the strain energy associated with deflections of the …

Large oscillation of electrostatically actuated curved beams

AM Alneamy, ME Khater, MS Al-Ghamdi… - Journal of …, 2020 - iopscience.iop.org
This paper investigates the responses of initially curved micro-beams subjected to an
electrostatic excitation. A Euler–Bernoulli beam theory is utilized to derive the governing …

Static and dynamic actuations of clamped-clamped V-shaped micro-resonators under electrostatic forces

N Alcheikh, HM Ouakad, SB Mbarek… - Mechanical Systems and …, 2021 - Elsevier
This work presents detailed static and dynamic analysis of electrostatically actuated in-plane
micro-electro-mechanical V-shaped micro-beam resonators. An analytical model is …