The transport of fluid and ions in nano/molecular confinements is the governing physics of a
myriad of embodiments in nature and technology including human physiology, plants …

This review reports the progress on the recent development of manufacturing methods of
nanochannels of bio-nanofluidic chips. Various manufacturing methods including reactive …

An approach to ultraviolet (UV) nanoimprint lithography using a cyclodextrin-based porous
template was investigated for the reduction of air trapping and template damage caused by …

A strong adhesion force between resist and underlayer materials was employed to reduce
resist pattern peeling generated from de-molding in step-and-flash imprint lithography …

Nanoimprint lithography is a newly developed patterning method that employs a hard
template for the patterning of structures at micro-and nanometer scales. This technique has …

A gas‐permeable cellulose template for microimprint lithography has been synthesized and
characterized for the reduction of template damage and gas trapping caused by solvents …

Currently, various techniques are being explored for fabricating nano-or microsized patterns
on flat and curved substrates. However, there are only a few techniques that can be used to …

This study aimed to expand the resolution limits of epoxy novolac resins that have enhanced
etch resistance as one of the desirable resist properties for next-generation devices. Epoxy …

The grating fabrication technique has been of great concern in the use of the grating based
deformation measurement method. Although various methods have been developed to …

Step and repeat ultraviolet (UV) nanoimprint lithography has advantages such as metal-
direct patterning, develop-less process, low line-edge-roughness and easy operation …