Magnetron sputtered titanium carbide-based coatings: A review of science and technology

H Larhlimi, A Ghailane, M Makha, J Alami - Vacuum, 2022 - Elsevier
Titanium carbide (TiC) coatings are widely used in several industrial applications, including
tooling and tribological applications. These materials are used due to their mechanical …

Plasma and ion sources in large area coating: A review

A Anders - Surface and Coatings Technology, 2005 - Elsevier
Efficient deposition of high-quality coatings often requires controlled application of excited or
ionized particles. These particles are either condensing (film-forming) or assisting by …

The energy balance at substrate surfaces during plasma processing

H Kersten, H Deutsch, H Steffen, GMW Kroesen… - Vacuum, 2001 - Elsevier
A summary is given of different elementary processes influencing the thermal balance and
energetic conditions of substrate surfaces during plasma processing. The discussed …

Thin film deposition with physical vapor deposition and related technologies

SM Rossnagel - Journal of Vacuum Science & Technology A: Vacuum …, 2003 - pubs.aip.org
The properties of thin films depend critically on how they are made. For the most part, thin
films are assembled in ways very different from the production of bulk materials. Thin films …

Tuning material properties of oxides and nitrides by substrate biasing during plasma-enhanced atomic layer deposition on planar and 3D substrate topographies

T Faraz, HCM Knoops, MA Verheijen… - … applied materials & …, 2018 - ACS Publications
Oxide and nitride thin-films of Ti, Hf, and Si serve numerous applications owing to the
diverse range of their material properties. It is therefore imperative to have proper control …

Study on the adhesion and tribological behavior of PVD TiAlN coatings with a multi-scale textured substrate surface

K Zhang, J Deng, X Guo, L Sun, S Lei - International Journal of Refractory …, 2018 - Elsevier
In this paper, we investigated the effects of multi-scale textures on improving the adhesion of
PVD TiAlN coating-carbide substrate composites, which is crucial for tribological …

Directional and ionized physical vapor deposition for microelectronics applications

SM Rossnagel - Journal of Vacuum Science & Technology B …, 1998 - pubs.aip.org
The manufacturing of interconnect features on semiconductor wafers has evolved from lift-off-
based evaporation to reactive ion etching metallization and now to Damascene technology …

Low-temperature synthesis of thermochromic vanadium dioxide thin films by reactive high power impulse magnetron sputtering

A Aijaz, YX Ji, J Montero, GA Niklasson… - Solar Energy Materials …, 2016 - Elsevier
Thermochromic (TC) vanadium dioxide thin films provide means for controlling solar energy
throughput and can be used for energy-saving applications such as smart windows. One of …

Physical and mechanical properties of hard nanocomposite films prepared by reactive magnetron sputtering

J Musil - Nanostructured coatings, 2006 - Springer
Nanocomposite coatings represent a new generation of materials. They are composed of at
least two separated phases with a nanocrystalline and/or amorphous structure …

Phase formation and microstructure changes in tantalum thin films induced by bias sputtering

P Catania, RA Roy, JJ Cuomo - Journal of applied physics, 1993 - pubs.aip.org
The effects of argon‐ion bombardment on the structure and properties of sputtered tantalum
films have been studied. Applied substrate bias voltage was used to control the …