Ultra‐thin flexible encapsulating materials for soft bio‐integrated electronics

M Sang, K Kim, J Shin, KJ Yu - Advanced Science, 2022 - Wiley Online Library
Recently, bioelectronic devices extensively researched and developed through the
convergence of flexible biocompatible materials and electronics design that enables more …

Cantilever transducers as a platform for chemical and biological sensors

NV Lavrik, MJ Sepaniak, PG Datskos - Review of scientific instruments, 2004 - pubs.aip.org
Since the late 1980s there have been spectacular developments in micromechanical or
microelectro-mechanical (MEMS) systems which have enabled the exploration of …

A digital holographic microscope for complete characterization of microelectromechanical systems

G Coppola, P Ferraro, M Iodice… - Measurement …, 2004 - iopscience.iop.org
Digital holographic microscopy (DHM) can be described as a non-invasive metrological tool
for inspection and characterization of microelectromechanical structures (MEMS). DHM is a …

Determination of the elastic moduli and residual stresses of freestanding Au-TiW bilayer thin films by nanoindentation

M Ghidelli, M Sebastiani, C Collet, R Guillemet - Materials & Design, 2016 - Elsevier
In this paper, we present a detailed mechanical characterization of freestanding bilayer (Au-
TiW) micro-cantilevers and double clamped beams, for applications as Radio Frequency …

Atomic force microscopy for nanoscale mechanical property characterization

G Stan, SW King - Journal of Vacuum Science & Technology B, 2020 - pubs.aip.org
Over the past several decades, atomic force microscopy (AFM) has advanced from a
technique used primarily for surface topography imaging to one capable of characterizing a …

Measurement of mechanical properties of cantilever shaped materials

E Finot, A Passian, T Thundat - Sensors, 2008 - mdpi.com
Microcantilevers were first introduced as imaging probes in Atomic Force Microscopy (AFM)
due to their extremely high sensitivity in measuring surface forces. The versatility of these …

Local surface mechanical properties of PDMS-silica nanocomposite probed with Intermodulation AFM

H Huang, I Dobryden, PA Thorén, L Ejenstam… - … Science and Technology, 2017 - Elsevier
The mechanical properties of polymeric nanocomposites are strongly affected by the nature
of the interphase between filler and matrix, which can be controlled by means of surface …

Electrically-latched compliant jumping mechanism based on a dielectric elastomer actuator

M Duduta, FCJ Berlinger, R Nagpal… - Smart Materials and …, 2019 - iopscience.iop.org
Jumping mechanisms are useful in robotics for locomotion in unstructured environments, or
for self-righting abilities. However, most rigid robots rely on impact with the ground to jump …

Annealing of deposited SiO2 thin films: full-atomistic simulation results

FV Grigoriev, EV Katkova, AV Sulimov… - Optical Materials …, 2016 - opg.optica.org
The previously developed high-performance method of the atomistic simulation of thin film
deposition is applied to the investigation of effects connected with SiO_2 films annealing. It …

Advanced residual stress analysis and FEM simulation on heteroepitaxial 3C–SiC for MEMS application

R Anzalone, G D'arrigo, M Camarda… - Journal of …, 2011 - ieeexplore.ieee.org
SiC is a candidate material for microelectromechanical and nanoelectromechanical
systems, but the high residual stress created during the film grow limits the development of …