Mismatching quality factors (Q-factors) is one of the main factors causing zero-rate output
(ZRO) in degenerate (DE) Micro-Electro-Mechanical Systems (MEMS) vibratory gyroscopes …

In this paper, a new design technique is presented to estimate and reduce the cross-axis
sensitivity (CAS) in a single-drive multi-axis microelectromechanical systems (MEMS) …

In this letter, a design technique is presented to reduce the cross-axis sensitivity (CAS) in
single-drive multi-axis microelectromechanical systems (MEMS) gyroscope. A design …

The feedthrough effect can significantly affect the performance of MEMS gyroscopes and
even lead to device failure. In order to address the inevitable problem of feedthrough …

Microelectromechanical systems (MEMS) resonators require fast, accurate, and cost-
effective testing for mass production. Among the different test methods, frequency domain …

Design Approach for Reducing Cross-Axis Sensitivity in a Single-Drive Multi-Axis MEMS
Gyroscope Page 1 micromachines Article Design Approach for Reducing Cross-Axis Sensitivity …

This paper presents a new coupling spring design for the MEMS tuning fork structure. The
spring design incorporates the outer arm, inner arm, and torsional arm. The outer and inner …