Size dependent free vibration analysis of nanoplates made of functionally graded materials based on nonlocal elasticity theory with high order theories

A Daneshmehr, A Rajabpoor, A Hadi - International Journal of Engineering …, 2015 - Elsevier
In this paper the free vibration behaviors of the nanoplate made of functionally graded
materials with small scale effects are investigated. To study the small scale effects on natural …

Nano-and micro-electromechanical resonators

M Rinaldi, Z Qian, Y Hui - US Patent 9,425,765, 2016 - Google Patents
US9425765B2 - Nano- and micro-electromechanical resonators - Google Patents
US9425765B2 - Nano- and micro-electromechanical resonators - Google Patents Nano- and …

Towards repeatable, scalable graphene integrated micro-nano electromechanical systems (MEMS/NEMS)

JH Cho, D Cayll, D Behera, M Cullinan - Micromachines, 2021 - mdpi.com
The demand for graphene-based devices is rapidly growing but there are significant
challenges for developing scalable and repeatable processes for the manufacturing of …

Review of bulk acoustic wave resonant optical detectors

X Zhao, M Zhao, W Peng, Y He - Sensors and Actuators A: Physical, 2023 - Elsevier
Bulk acoustic wave (BAW) resonant optical detectors (RODs) operate at radio frequency,
and have the following advantages: they are suitable for wireless detection systems, have …

Shape memory polymer resonators as highly sensitive uncooled infrared detectors

U Adiyan, T Larsen, JJ Zárate, LG Villanueva… - Nature …, 2019 - nature.com
Uncooled infrared detectors have enabled the rapid growth of thermal imaging applications.
These detectors are predominantly bolometers, reading out a pixel's temperature change …

-Pitch Electromechanical Resonator for Thermal Sensing

L Laurent, JJ Yon, JS Moulet, M Roukes… - Physical Review Applied, 2018 - APS
We provide here a demonstration of 12-μ m-pitch nanoelectromechanical resonant infrared
sensors with fully integrated capacitive transduction. A low-temperature fabrication process …

Nanoelectromechanical infrared detector

M Piller, N Luhmann, MH Chien… - … Sensing, Imaging, and …, 2019 - spiedigitallibrary.org
The sensitive detection of infrared (IR) radiation is a essential task in today's modern world.
The sensitivity of the state-of-the-art uncooled thermal infrared detectors is still several …

Nano-and micro-electromechanical resonators

M Rinaldi, C Cassella, Z Qian, Y Hui - US Patent 9,419,583, 2016 - Google Patents
(60) Provisional application No. 62/132,755, filed on Mar. A resonator includes a
piezoelectric plate and interdigitated 13, 2015, provisional application No. 62/213,876 …

Super High Frequency Aluminum Nitride Two-Dimensional-Mode Resonators With Exceeding 4.9%

C Cassella, N Oliva, J Soon, M Srinivas… - IEEE Microwave and …, 2017 - ieeexplore.ieee.org
In this work we demonstrate high values of electromechanical coupling coefficient (kt 2)
exceeding 4.9% in 1-μm thick Aluminum Nitride (AlN) two-dimensional-mode resonators …

Uncooled infrared detector based on an aluminum nitride piezoelectric fishnet metasurface

Y Hui, S Kang, Z Qian, M Rinaldi - Journal of …, 2021 - ieeexplore.ieee.org
This article reports on the first demonstration of a high resolution (~ 1.9 nW/Hz 1/2 measured
in 200 Hz bandwidth) and fast (~ 5.3 ms) uncooled Infrared (IR) detector based on a high …