An ionization region model of the reactive Ar/O2 high power impulse magnetron sputtering discharge

JT Gudmundsson, D Lundin, N Brenning… - Plasma Sources …, 2016 - iopscience.iop.org
A new reactive ionization region model (R-IRM) is developed to describe the reactive Ar/O 2
high power impulse magnetron sputtering (HiPIMS) discharge with a titanium target. It is …

Kinetics of highly vibrationally excited O2 (X) molecules in inductively-coupled oxygen plasmas

A Annušová, D Marinov, JP Booth… - Plasma Sources …, 2018 - iopscience.iop.org
The high degree of vibrational excitation of O 2 ground state molecules recently observed in
inductively coupled plasma discharges is investigated experimentally in more detail and …

A reaction mechanism for oxygen plasmas

TC Dias, C Fromentin, LL Alves… - Plasma Sources …, 2023 - iopscience.iop.org
This work presents a reaction mechanism for oxygen plasmas, ie a set of reactions and
corresponding rate coefficients that are validated against benchmark experiments. The …

Global plasma modeling of a magnetized high-frequency plasma source in low-pressure nitrogen and oxygen for air-breathing electric propulsion applications

K Mrózek, T Dytrych, P Moliš, V Dániel… - … Sources Science and …, 2021 - iopscience.iop.org
This work presents a global plasma model of a gridded air-breathing electric propulsion
concept based on magnetized high-frequency plasma operating in the pressure range of …

On electron heating in a low pressure capacitively coupled oxygen discharge

JT Gudmundsson, DI Snorrason - Journal of Applied Physics, 2017 - pubs.aip.org
We use the one-dimensional object-oriented particle-in-cell Monte Carlo collision code
oopd1 to explore the charged particle densities, the electronegativity, the electron energy …

Plasma treatment of ultrathin layered semiconductors for electronic device applications

J Jadwiszczak, DJ Kelly, J Guo, Y Zhou… - ACS Applied Electronic …, 2021 - ACS Publications
The incorporation of two-dimensional (2D) semiconductors into future electronic devices will
require electronic-grade, large-scale, and cost-effective means of doping and chemical …

The role of the metastable O2 (b) and energy-dependent secondary electron emission yields in capacitively coupled oxygen discharges

H Hannesdottir, JT Gudmundsson - Plasma Sources Science and …, 2016 - iopscience.iop.org
The effects of including the singlet metastable molecule O 2 (b ${{}^{1}}\Sigma_ {\text {g}}^{+}
$) in the discharge model of a capacitively coupled rf driven oxygen discharge are explored …

The pressure dependence of the discharge properties in a capacitively coupled oxygen discharge

JT Gudmundsson, B Ventéjou - Journal of Applied Physics, 2015 - pubs.aip.org
We use the one-dimensional object-oriented particle-in-cell Monte Carlo collision code
oopd1 to explore the evolution of the charged particle density profiles, electron heating …

On the EH transition in inductively coupled radio frequency oxygen plasmas: I. Density and temperature of electrons, ground state and singlet metastable molecular …

T Wegner, C Küllig, J Meichsner - Plasma Sources Science and …, 2017 - iopscience.iop.org
In this series of two papers, the EH transition in a planar inductively coupled radio frequency
discharge (13.56 MHz) in pure oxygen is studied using comprehensive plasma diagnostic …

Relationships among growth mechanism, structure and morphology of PEALD TiO2 films: the influence of O2 plasma power, precursor chemistry and plasma …

W Chiappim, GE Testoni, A Doria, RS Pessoa… - …, 2016 - iopscience.iop.org
Titanium dioxide (TiO 2) thin films have generated considerable interest over recent years,
because they are functional materials suitable for a wide range of applications. The efficient …