Measurement and ab initio Investigation of Structural, Electronic, Optical, and Mechanical Properties of Sputtered Aluminum Nitride Thin Films
We report our results on highly textured aluminum nitride (AlN) thin films deposited on glass
substrates, oriented along the c-axis, using DC-magnetron sputtering technique for different …
substrates, oriented along the c-axis, using DC-magnetron sputtering technique for different …
[图书][B] Handbook of humidity measurement, volume 2: Electronic and electrical humidity sensors
G Korotcenkov - 2019 - books.google.com
Because of unique water properties, humidity affects many living organisms, including
humans and materials. Humidity control is important in various fields, from production …
humans and materials. Humidity control is important in various fields, from production …
High-sensitivity humidity sensors with ZnO nanorods based two-port surface acoustic wave delay line
This paper describes the fabrication and characterization of zinc oxide (ZnO) nanorods
based surface acoustic wave (SAW) humidity sensors. In this work, the ZnO nanorods were …
based surface acoustic wave (SAW) humidity sensors. In this work, the ZnO nanorods were …
The effect of post-annealing on surface acoustic wave devices based on ZnO thin films prepared by magnetron sputtering
Zinc oxide (ZnO) thin films were deposited on unheated silicon substrates via radio
frequency (RF) magnetron sputtering, and the post-deposition annealing of the ZnO thin …
frequency (RF) magnetron sputtering, and the post-deposition annealing of the ZnO thin …
Surface acoustic wave humidity sensor based on polycrystalline AlN thin film coated with sol–gel derived nanocrystalline zinc oxide film
In this work, the nanocrystalline ZnO/polycrystalline (poly) aluminum nitride (AlN)/Si-layered
structure was fabricated for humidity sensor applications based on surface acoustic wave …
structure was fabricated for humidity sensor applications based on surface acoustic wave …
Humidity sensing characteristics of Ga-doped zinc oxide film grown on a polycrystalline AlN thin film based on a surface acoustic wave
In this work, the effect of the Ga dopant concentration on the sensing responses of a surface
acoustic wave (SAW) humidity sensor with a nanocrystalline ZnO/polycrystalline aluminum …
acoustic wave (SAW) humidity sensor with a nanocrystalline ZnO/polycrystalline aluminum …
Synthesis and structural characterization of Ga-ZnO nanodisk/nanorods formation by polymer assisted hydrothermal process
K Thirunavukkarasu, R Jothiramalingam - Powder technology, 2013 - Elsevier
Synthesis and characterization of Ga-doped ZnO nanodisk and the formation of
nanodisk/nanorod hybrid morphologies on AlN/Si substrate by polymer assisted one-pot …
nanodisk/nanorod hybrid morphologies on AlN/Si substrate by polymer assisted one-pot …
Aluminium nitride thin film acoustic wave device for microfluidic and biosensing applications
When an alternating electric field is applied to an interdigitated transducer (IDT) on a
piezoelectric material, an acoustic wave is generated. The wave can propagate in a …
piezoelectric material, an acoustic wave is generated. The wave can propagate in a …
Growth and characterization of AlN thin film deposited by sol-gel spin coating techniques
MA Nurfahana, ZY Lee, CY Fong… - Advanced Materials …, 2015 - Trans Tech Publ
This study signifies the growth and characterization of aluminium nitride (AlN) thin film
deposited on the atmospheric plasma treated n-type silicon [n-Si (100)]. Basically, the low …
deposited on the atmospheric plasma treated n-type silicon [n-Si (100)]. Basically, the low …
FEM modeling SAW humidity sensor based on ZnO/IDTs/AlN/Si structures
In this study, we demonstrate a finite element method (FEM) simulation approach of surface
acoustic wave (SAW) humidity sensors. The polycrystalline Zinc oxide (ZnO)/Aluminum …
acoustic wave (SAW) humidity sensors. The polycrystalline Zinc oxide (ZnO)/Aluminum …