Measurement and ab initio Investigation of Structural, Electronic, Optical, and Mechanical Properties of Sputtered Aluminum Nitride Thin Films

AM Alsaad, QM Al-Bataineh, IA Qattan, AA Ahmad… - Frontiers in …, 2020 - frontiersin.org
We report our results on highly textured aluminum nitride (AlN) thin films deposited on glass
substrates, oriented along the c-axis, using DC-magnetron sputtering technique for different …

[图书][B] Handbook of humidity measurement, volume 2: Electronic and electrical humidity sensors

G Korotcenkov - 2019 - books.google.com
Because of unique water properties, humidity affects many living organisms, including
humans and materials. Humidity control is important in various fields, from production …

High-sensitivity humidity sensors with ZnO nanorods based two-port surface acoustic wave delay line

HS Hong, DT Phan, GS Chung - Sensors and Actuators B: Chemical, 2012 - Elsevier
This paper describes the fabrication and characterization of zinc oxide (ZnO) nanorods
based surface acoustic wave (SAW) humidity sensors. In this work, the ZnO nanorods were …

The effect of post-annealing on surface acoustic wave devices based on ZnO thin films prepared by magnetron sputtering

DT Phan, GS Chung - Applied Surface Science, 2011 - Elsevier
Zinc oxide (ZnO) thin films were deposited on unheated silicon substrates via radio
frequency (RF) magnetron sputtering, and the post-deposition annealing of the ZnO thin …

Surface acoustic wave humidity sensor based on polycrystalline AlN thin film coated with sol–gel derived nanocrystalline zinc oxide film

HS Hong, GS Chung - Sensors and Actuators B: Chemical, 2010 - Elsevier
In this work, the nanocrystalline ZnO/polycrystalline (poly) aluminum nitride (AlN)/Si-layered
structure was fabricated for humidity sensor applications based on surface acoustic wave …

Humidity sensing characteristics of Ga-doped zinc oxide film grown on a polycrystalline AlN thin film based on a surface acoustic wave

HS Hong, GS Chung - Sensors and Actuators B: Chemical, 2010 - Elsevier
In this work, the effect of the Ga dopant concentration on the sensing responses of a surface
acoustic wave (SAW) humidity sensor with a nanocrystalline ZnO/polycrystalline aluminum …

Synthesis and structural characterization of Ga-ZnO nanodisk/nanorods formation by polymer assisted hydrothermal process

K Thirunavukkarasu, R Jothiramalingam - Powder technology, 2013 - Elsevier
Synthesis and characterization of Ga-doped ZnO nanodisk and the formation of
nanodisk/nanorod hybrid morphologies on AlN/Si substrate by polymer assisted one-pot …

Aluminium nitride thin film acoustic wave device for microfluidic and biosensing applications

YQ Fu, JS Cherng, JK Luo, MPY Desmulliez, Y Li… - Acoustic …, 2010 - books.google.com
When an alternating electric field is applied to an interdigitated transducer (IDT) on a
piezoelectric material, an acoustic wave is generated. The wave can propagate in a …

Growth and characterization of AlN thin film deposited by sol-gel spin coating techniques

MA Nurfahana, ZY Lee, CY Fong… - Advanced Materials …, 2015 - Trans Tech Publ
This study signifies the growth and characterization of aluminium nitride (AlN) thin film
deposited on the atmospheric plasma treated n-type silicon [n-Si (100)]. Basically, the low …

FEM modeling SAW humidity sensor based on ZnO/IDTs/AlN/Si structures

DT Phan, GS Chung - 2011 16th International Solid-State …, 2011 - ieeexplore.ieee.org
In this study, we demonstrate a finite element method (FEM) simulation approach of surface
acoustic wave (SAW) humidity sensors. The polycrystalline Zinc oxide (ZnO)/Aluminum …