Vacuum equipment has a wide range of applications, and vacuum monitoring in such
equipment is necessary in order to meet practical applications. Pirani sensors work by using …

The operating principle of Pirani pressure sensors is based on the pressure dependence of
a suspended strip's electrical conductivity, caused by the thermal conductance of the …

The application of pressure sensors in harsh environments is typically hindered by the
stability of the material over long periods of time. This work focuses on the design and …

An optimized microelectromechanical systems Pirani sensor with increased sensitivity for
pressure measurements in the fine and high vacuum regime (from 10 0 to 10− 6 Torr) is …

MEMS thermal vacuum sensors have been widely applied in many academic and industry
fields, and pressure range is a key performance of MEMS thermal vacuum sensors. To …

This work discusses the design, finite element method modeling (FEM), fabrication and
characterization of a silicon-based, catalytic micro calorimetric sensor. The sensing area is …

Sensitivity improvement and measurable pressure limit extension of Pirani vacuum gauge
are urgent needed for meeting the rapid growing requirements in ultra-low and wide-range …

A new microelectromechanical systems (MEMS) Pirani sensor with a working range from
10− 3 to 7.6× 10 2 Torr and an increased sensitivity in the rough vacuum regime is …

A new analytical model for the design of micromachined Pirani gauges operating in constant
current mode is presented. This model expresses the pressure range as a closed-form …

A nanoporous Pirani sensor based on anodic aluminum oxide (AAO) is proposed, and the
quantitative relationship between the performance of the sensor and the porosity of the AAO …