RF acoustic microsystems based on suspended lithium niobate thin films: Advances and outlook
This paper presents a review of the radio frequency thin-film lithium niobate (LiNbO 3) based
acoustic microsystems. Thanks to their high electromechanical coupling (k 2), low loss, and …
acoustic microsystems. Thanks to their high electromechanical coupling (k 2), low loss, and …
Large coupling acoustic wave resonators based on LiNbO₃/SiO₂/Si functional substrate
In this work, wide band radio-frequency (RF) shear-horizontal surface acoustic wave (SH-
SAW) resonators were designed and fabricated to attain a large effective electromechanical …
SAW) resonators were designed and fabricated to attain a large effective electromechanical …
Surface-acoustic-wave devices based on lithium niobate and amorphous silicon thin films on a silicon substrate
This work presents an acoustic platform using solidly mounted thin-oriented lithium niobate
(LiNbO3) film on silicon (Si). A thin layer of amorphous Si eliminates a conductive layer …
(LiNbO3) film on silicon (Si). A thin layer of amorphous Si eliminates a conductive layer …
High-Performance Acoustic Wave Devices on LiTaO3/SiC Hetero-Substrates
We present high-performance shear horizontal surface acoustic wave (SH-SAW) and
longitudinal leaky SAW (LL-SAW) devices using lithium tantalate (LiTaO3) thin films on …
longitudinal leaky SAW (LL-SAW) devices using lithium tantalate (LiTaO3) thin films on …
Thin-film lithium niobate-on-insulator (LNOI) shear horizontal surface acoustic wave resonators
Thin-film lithium niobate-on-insulator (LNOI) shear horizontal surface acoustic wave resonators
- IOPscience Skip to content IOP Science home Accessibility Help Search Journals Journals list …
- IOPscience Skip to content IOP Science home Accessibility Help Search Journals Journals list …
Near-zero drift and high electromechanical coupling acoustic resonators at> 3.5 GHz
In this article, near-zero drift and high electromechanical coupling acoustic resonators have
been designed and demonstrated. The acoustic resonator is based on Lamb acoustic waves …
been designed and demonstrated. The acoustic resonator is based on Lamb acoustic waves …
7.5 GHz near-zero temperature coefficient of frequency lithium niobate resonator
K Liu, Y Lu, T Wu - IEEE Electron Device Letters, 2022 - ieeexplore.ieee.org
This work presents a low temperature coefficient of frequency (TCF) and high-performance
S4 mode acoustic resonator based on LiNbO3/SiO2/a-Si/Si (trap-rich layer assisted LiNbO3 …
S4 mode acoustic resonator based on LiNbO3/SiO2/a-Si/Si (trap-rich layer assisted LiNbO3 …
Microheater Topology for Advanced Gas Sensor Applications with Carbyne-Enriched Nanomaterials
M Aleksandrova, B Ustova, T Tsanev, I Raptis… - Applied Sciences, 2024 - mdpi.com
Featured Application Biomedical or environmental monitoring sensors. Abstract The
response characteristics of carbyne-enriched surface-acoustic-wave (SAW)-based gas …
response characteristics of carbyne-enriched surface-acoustic-wave (SAW)-based gas …
Transversely-excited film bulk acoustic resonator with a front-side dielectric layer and optimized pitch and mark
Acoustic resonators and filter devices. An acoustic resonator includes a piezoelectric plate
having front and back surfaces, a portion of the piezoelectric plate forming a diaphragm, a …
having front and back surfaces, a portion of the piezoelectric plate forming a diaphragm, a …
A near zero tcf acoustic resonator with high electromechanical coupling of 13.5% at 3.5 ghz
In this paper, the design, implementation, and measurements of a near-zero temperature
coefficient of frequency (TCF) acoustic resonator are demonstrated. The acoustic resonator …
coefficient of frequency (TCF) acoustic resonator are demonstrated. The acoustic resonator …