Wafer-level hybrid integration of complex micro-optical modules
P Dannberg, F Wippermann, A Brückner, A Matthes… - Micromachines, 2014 - mdpi.com
A series of technological steps concentrating around photolithography and UV polymer on
glass replication in a mask-aligner that allow for the cost-effective generation of rather …
glass replication in a mask-aligner that allow for the cost-effective generation of rather …
Performance analysis of surface reconstruction algorithms in vertical scanning interferometry based on coherence envelope detection
Optical interferometry plays an important role in the topographical surface measurement and
characterization in precision/ultra-precision manufacturing. An appropriate surface …
characterization in precision/ultra-precision manufacturing. An appropriate surface …
A simple method for quality evaluation of micro-optical components based on 3D IPSF measurement
This paper presents a simple method based on the measurement of the 3D intensity point
spread function for the quality evaluation of high numerical aperture micro-optical …
spread function for the quality evaluation of high numerical aperture micro-optical …
Dense arrays of millimeter-sized glass lenses fabricated at wafer-level
This paper presents the study of a fabrication technique of lenses arrays based on the reflow
of glass inside cylindrical silicon cavities. Lenses whose sizes are out of the microfabrication …
of glass inside cylindrical silicon cavities. Lenses whose sizes are out of the microfabrication …
Integration of cross-scale milli/microlenses by ion beam etching and femtosecond laser modification
JY Qi, ZY Zhao, ZJ Liu, BX Wang, XQ Liu - Optics Letters, 2023 - opg.optica.org
Integrated cross-scale milli/microlenses offer irreplaceable functions in modern integrated
optics with the advantage of reducing the size of the optical system to millimeters or microns …
optics with the advantage of reducing the size of the optical system to millimeters or microns …
Swept source optical coherence tomography endomicroscope based on vertically integrated mirau micro interferometer: Concept and technology
This paper presents a concept of an endomicroscope for an early detection of neoplastic
lesions in the human stomach tissue, based on the swept source optical coherence …
lesions in the human stomach tissue, based on the swept source optical coherence …
Nondestructive surface profiling of hidden MEMS using an infrared low-coherence interferometric microscope
J Krauter, W Osten - Surface Topography: Metrology and …, 2018 - iopscience.iop.org
There are a wide range of applications for micro-electro-mechanical systems (MEMS). The
automotive and consumer market is the strongest driver for the growing MEMS industry. A …
automotive and consumer market is the strongest driver for the growing MEMS industry. A …
An electrostatic vertical microscanner for phase modulating array-type Mirau microinterferometry
We present a micromachined vertical scanner with a $4\times 4$ array of suspended'spider-
type'micromirrors which is a key component of a multi-channel'active'Mirau …
type'micromirrors which is a key component of a multi-channel'active'Mirau …
Swept-source optical coherence tomography microsystem with an integrated Mirau interferometer and electrothermal micro-scanner
In the rapid evolution of gastrointestinal endomicroscopy, optical coherence tomography
(OCT) has found many diverse applications. Until recently, the micro-opto–electro …
(OCT) has found many diverse applications. Until recently, the micro-opto–electro …
Wafer-level fabrication of microcube-typed beam-splitters by saw-dicing of glass substrate
This letter reports on the development of an integrated micro-optical beam splitter that can
be array-arranged. The proposed wafer-level fabrication, based on 45° saw-dicing of glass …
be array-arranged. The proposed wafer-level fabrication, based on 45° saw-dicing of glass …