A thin film deposition apparatus used to manufacture large substrates on a mass scale and
that allows high-definition patterning, and a method of manufacturing an organic light …

US8852687B2 - Organic layer deposition apparatus - Google Patents US8852687B2 - Organic
layer deposition apparatus - Google Patents Organic layer deposition apparatus Download PDF …

(57) ABSTRACT A thin film deposition apparatus that can be simply applied to produce large-
sized display devices on a mass scale and that improves manufacturing yield. The thin film …

A thin film deposition apparatus, a method of manufacturing an organic light-emitting display
device by using the thin film deposition apparatus, and an organic light-emitting display …

A thin film deposition apparatus that can be applied to manufacture large-sized display
devices on a mass scale and that improves manufacturing yield, and a method of …

A thin film deposition apparatus includes: a deposition source for discharging a deposition
material; a deposition source nozzle unit disposed at a side of the deposition source and …

An organic layer deposition apparatus that may be precisely aligned with a substrate during
a deposition process. The apparatus includes: a deposition source; a deposition source …

A thin film deposition apparatus and a method of manufacturing an organic light-emitting
display device by using the same, and more particularly, to a thin film deposition apparatus …

A method of manufacturing an organic light emitting display device and an organic light
emitting display device manufactured using the method, which are suitable for …

An organic film deposition apparatus includes: a deposition Source that discharges a
deposition material; a deposition source nozzle unit located at a side of the deposition …