Considering microbotics, microforce sensing, their working environment, and their control
architecture together, microrobotic force-sensing systems provide the potential to outperform …

We report high-performance control of a MEMS force sensor to provide high-bandwidth
reference tracking under uncertain conditions. A key novelty is the implementation of a zero …

This paper presents a novel one-degree-of-freedom microelectromechanical systems
(MEMS) force sensor. The high-bandwidth device contains on-chip sensing and actuation …

This paper presents a novel double-actuator position-feedback mechanism for micro electro-
mechanical electrostatic-capacitive force sensors. Compared to a single-actuator position …

This paper presents a force-controlled microelectromechanical systems rotary microgripper
with integrated electrothermal sensors. The proposed microgripper achieves a large …

We present a microelectromechanical system (MEMS)-based closed-loop force sensor,
capable of measuring bidirectional forces along one axis of motion. The device comprises …

Slow Z-axis dynamics of Scanning Tunneling Microscope (STM) is a key contributing factor
to the slow scan speed of this instrument. A great majority of STM systems use piezotube …

PTB has developed a new contact based method for the traceable calibration of the normal
stiffness of AFM cantilevers in the range from 0.03 N m− 1 to 300 N m− 1 to the SI units …

Limited Z-axis bandwidth of piezotube scanners employed in conventional Scanning
Tunneling Microscopes (STMs) has been a major limiting factor in achieving high scan …

This article presents a novel double-stage microelectromechanical systems (MEMS) force
sensor fabricated using a silicon-on-insulator process. The sensor comprises two stages. An …