Review on grazing incidence X-ray spectrometry and reflectometry

KN Stoev, K Sakurai - Spectrochimica Acta Part B: Atomic Spectroscopy, 1999 - Elsevier
Grazing incidence X-ray techniques are now widely used for surface and thin film analysis.
The present article overviews the recent advancement since 1993 of the grazing incidence X …

[图书][B] X-ray metrology in semiconductor manufacturing

DK Bowen, BK Tanner - 2018 - taylorfrancis.com
The scales involved in modern semiconductor manufacturing and microelectronics continue
to plunge downward. Effective and accurate characterization of materials with thicknesses …

Stochastic fitting of specular X-ray reflectivity data using StochFit

SM Danauskas, D Li, M Meron, B Lin… - Journal of Applied …, 2008 - journals.iucr.org
Specular X-ray reflectivity data provide detailed information on the electron density
distribution at an interface. Typical modeling methods involve choosing a generic electron …

Material-specific imaging of nanolayers using extreme ultraviolet coherence tomography

F Wiesner, M Wünsche, J Reinhard, JJ Abel… - Optica, 2021 - opg.optica.org
Scientific and technological progress depend substantially on the ability to image on the
nanoscale. In order to investigate complex, functional, nanoscopic structures like, eg …

High-throughput optimization of near-infrared-transparent Mo-doped In2O3 thin films with high conductivity by combined use of atmospheric-pressure mist chemical …

N Yamada, M Yamada, H Toyama, R Ino, X Cao… - Thin Solid Films, 2017 - Elsevier
Thin films of near-infrared (NIR)-transparent and highly conductive Mo-doped In 2 O 3 (IMO)
were prepared as transparent electrodes in thin-film photovoltaic cells and energy-efficient …

Optical Response Near the Soft X‐Ray Absorption Edges and Structural Studies of Low Optical Contrast System Using Soft X‐Ray Resonant Reflectivity

M Nayak, GS Lodha - Journal of Atomic and Molecular Physics, 2011 - Wiley Online Library
Fine structure features of energy‐dependent atomic scattering factor near the atomic
absorption edge, are used for structural analysis of low‐Z containing thin film structures. The …

Electronic states of gallium oxide epitaxial thin films and related atomic arrangement

Y Chen, O Sakata, H Morita, A Matsuda, F Jia… - Applied Surface …, 2022 - Elsevier
Amorphous, crystallized, and Mg-doped β-Ga 2 O 3 thin films are investigated to understand
the evolution of electronic states and the related atomic arrangement. In the process from the …

Formation of ultrathin Liesegang patterns

J Jiang, K Sakurai - Langmuir, 2016 - ACS Publications
For many years, it has been believed that self-organized periodic ring structures known by
the name of Liesegang patterns (LPs) are formed only in quite thick media, typically thicker …

Significance of Frequency Analysis in X-ray Rflectivity: Towards analysis which does not depend too much on models

K Sakurai, M Mizusawa, M Ishii - … of the Materials Research Society of …, 2008 - jstage.jst.go.jp
The present paper discusses the feasibility of frequency analysis of X-ray reflectivity data,
which have been used extensively to obtain information on density, layer thickness, surface …

Calibration and alignment of X-ray reflectometric systems

LN Koppel, CE Uhrich, J Opsal - US Patent 6,453,006, 2002 - Google Patents
The present invention relates to the calibration and align ment of an X—ray re? ectometry
(“XRR”) system for mea suring thin? lms. An aspect of the present invention describes a …