Through remote forces, levitating micro-actuators completely eliminate mechanical
attachment between the stationary and moving parts of a micro-actuator, thus providing a …

A micromachined electrostatically suspended gyroscope is described in this paper, in which
a spinning ring-shaped rotor is suspended by an electric bearing in five degrees of freedom …

A three-axis micromachined accelerometer with a proof mass suspended electrostatically in
six degrees of freedom was designed and tested to evaluate its performance of this sensitive …

This paper presents the rotation control design and experimental performance of a
microelectromechanical systems (MEMS) variable-capacitance motor where a free-spinning …

This book presents inductive and hybrid levitation micro-systems and their applications in
micro-sensors and–actuators. It proposes and discusses analytical and quasi-finite element …

An electric bearing used to support a micromachined rotor of variable-capacitance motors
was designed and tested in order to study the characteristics of this frictionless bearing …

The authors report a novel electret‐based miniature electrostatic motor with an electret film
as the stator and a metal electrode as the rotor. A particular commutator is used to transform …

In this paper a silicon-based micromachined electrostatically suspended accelerometer (Si-
MESA), which employs a free parallelepiped proof mass suspended in six degree of …

A micromachined gyroscope in which a high-speed spinning rotor is suspended
electrostatically in a vacuum cavity usually functions as a dual-axis angular rate sensor. An …

A three-axis micromachined accelerometer where a free proof mass is suspended
electrostatically in six degrees of freedom is proposed and tested in order to evaluate this …