Devices based on co-integrated MEMS actuators and optical waveguide: a review
F Chollet - Micromachines, 2016 - mdpi.com
The convergence of Micro Electro Mechanical Systems (MEMS) and optics was, at the end
of the last century, a fertile ground for a new breed of technological and scientific …
of the last century, a fertile ground for a new breed of technological and scientific …
Fabrication and deformation of 3D multilayered kirigami microstructures
Mechanically guided 3D microassembly with controlled compressive buckling represents a
promising emerging route to 3D mesostructures in a broad range of advanced materials …
promising emerging route to 3D mesostructures in a broad range of advanced materials …
Evaluation of effective elastic, piezoelectric, and dielectric properties of SU8/ZnO nanocomposite for vertically integrated nanogenerators using finite element method
A nanogenerator is a nanodevice which converts ambient mechanical energy into electrical
energy. A piezoelectric nanocomposite, composed of vertical arrays of piezoelectric zinc …
energy. A piezoelectric nanocomposite, composed of vertical arrays of piezoelectric zinc …
Rapid prototyping of PDMS devices using SU-8 lithography
G Jenkins - Microfluidic Diagnostics: Methods and Protocols, 2013 - Springer
This protocol describes the fabrication of single and multi-layer SU-8 microstructures for
generating microfluidic devices via PDMS (polymethyldisiloxane) casting. SU-8 is a …
generating microfluidic devices via PDMS (polymethyldisiloxane) casting. SU-8 is a …
Low-stress fabrication of 3D polymer free standing structures using lamination of photosensitive films
P Abgrall, S Charlot, R Fulcrand, L Paul… - Microsystem …, 2008 - Springer
Free-standing microstructures such as cantilevers, membranes or microchannels are
building blocks of microfluidic systems and MEMS. As a complement to silicon, the large …
building blocks of microfluidic systems and MEMS. As a complement to silicon, the large …
Metal-organic hybrid resonant terahertz absorbers with SU-8 photoresist dielectric layer
We report on the characterization of metal-organic hybrid metamaterials for MEMS-based
terahertz (THz) thermal sensors and on the characterization of refractive index of SU-8 in the …
terahertz (THz) thermal sensors and on the characterization of refractive index of SU-8 in the …
Design and optimization of reconfigurable reflectarray element with MEMS phase shifter
The design and optimization process of reconfigurable reflectarray element with MEMS-
based phase shifter at 120 GHz is presented. The dielectric properties of SU-8 substrate are …
based phase shifter at 120 GHz is presented. The dielectric properties of SU-8 substrate are …
Electrostatically driven large aperture micro-mirror actuator assemblies for high fill-factor, agile optical phase arrays
JP Walton - 2015 - scholar.afit.edu
Aircraft laser beamsteering is accomplished using a single gimbaled mirror housed inside a
turret, which protrudes from the fuselage and causes unwanted turbulence, vibrations, and …
turret, which protrudes from the fuselage and causes unwanted turbulence, vibrations, and …
[图书][B] Induktive Mikrosysteme: Technologieentwicklung und Anwendung
V Seidemann - 2003 - d-nb.info
Die Mikrosystemtechnik hat sich im letzten Jahrzehnt rasant weiterentwickelt und hält immer
mehr Einzug in vielfältige und komplexe technische Produkte. Dabei werden einerseits …
mehr Einzug in vielfältige und komplexe technische Produkte. Dabei werden einerseits …
[PDF][PDF] Investigation of Polyaniline (PANi) and SU-8 Composite Conductive Polymer: Pattern Ability and Electrical Characteristics
CV Patel - 2012 - digitalcollections.sdsu.edu
Micro-Electro-Mechanical Systems (MEMS) technology promises to change nearly every
product category by bringing together silicon-based microelectronics with micromachining …
product category by bringing together silicon-based microelectronics with micromachining …