Semiconductor nanocrystals have attracted considerable interest for a wide range of
applications including light-emitting devices and displays, photovoltaic cells, nanoelectronic …

In the past 2 years major advances have been made in the understanding of silane–
hydrogen plasmas. In particular, the control of the formation of clusters and even crystallites …

The dielectric functions of amorphous and polymorphous silicon films prepared under
various plasma conditions have been deduced from UV-visible spectroscopic ellipsometry …

The plasma processes and growth reactions involved in the deposition of amorphous,
polymorphous and microcrystalline silicon thin films are reviewed. The reference being a-Si …

A new silicon hydride clustering model was developed to study the nucleation of particles in
a low-temperature silane plasma. The model contains neutral silanes, silylenes, silenes and …

The formation of particles in low-pressure silane discharges has been studied extensively
over the last decade. In this paper we try to identify, by numerical simulations, the precursors …

Nanostructured Si thin films, also referred as polymorphous, were grown by plasma-
enhanced chemical vapor deposition. The term “polymorphous” is used to define silicon …

Low temperature plasmas with their strong non equilibrium character offer unique
possibilities for the production of nanoparticles. This contribution deals with size dependent …

Polymorphous silicon is a nanostructured thin film consisting of a small fraction of
nanocrystalline silicon particles and/or clusters embedded in a relaxed amorphous matrix …

The effect of RF power on the nanocrystallization of a Si: H network has been studied by
PECVD at a substrate temperature of 200 C and a gas pressure of 0.5 Torr, using silane as …