Micromanipulation is a hot topic due to its enabling role in various research fields. In order to
perform a high precision operation at a small scale, compliant mechanisms have been …

This article provides an overview of the operational strategies adopted in microgrippers
design. The review covers microgrippers recently proposed in Literature, some of which …

Nanopositioners are high-precision mechatronic devices that are capable of generating
mechanical motion with nanometer or sub-nanometer resolution. With this motion typically …

We report the design, characterization, and control of a high-bandwidth
microelectromechanical systems (MEMS) nanopositioner for on-chip atomic force …

We describe a novel high-bandwidth two degree of freedom microelectromechanical system
nanopositioner. On-chip piezoresistive sensors and four electrostatic actuators are …

In this paper, a digital actuators array composed of 25 elementary digital actuators placed in
a 5× 5 matrix configuration is presented. The originality of the elementary digital actuator lies …

We present a comprehensive study of the design, modeling, and characterization of an on-
chip piezoresistive displacement sensor. The design is based on the bulk piezoresistivity of …

Nanopositioning is the actuation and sensing of motion on the nanometer scale and recent
nanopositioner designs have been utilizing microelectromechanical systems (MEMS). This …

We report a novel piezoresistive microelectromechanical system (MEMS) differential
displacement sensing technique with a minimal footprint realized through a standard MEMS …

We demonstrate a novel tracking controller formulation based on a linear time-varying
Kalman filter to regulate amplitude and phase of a reference signal independently. The …