Hydrocarbon fuel and hydrogen are used as fuels for micro power equipment to replace
traditional batteries and provide energy for micro-electromechanical systems, which has …

Abstract The need for Power Micro Electro Mechanical Systems (Power MEMS) is growing
as microfabrication techniques and microelectronics advance. Conventional chemical …

This chapter discusses reactive ion etching (RIE) and deep RIE (DRIE) on wafers detailing
the various equipment and reactor requirements for different applications. The Bosch …

Micro-/meso-scale combustion represents a great potential in generating portable power in
an efficient way. Heat recirculation is regarded as the most important factor that influences …

A numerical study on CH4–air premixed combustion in micro-combustors was undertaken
by solving the 2D governing equations. The effects of combustor size and geometry, inlet …

The micro combustor is a key component of the micro thermophotovoltaic (TPV) system.
Premixed combustion of a hydrogen–air mixture in micro combustors with an inner diameter …

Premixed combustion of hydrogen gas and air was performed in a stainless steel based
micro-annular combustor for a micro-gas turbine system. Micro-scale combustion has …

The micro-combustor (emitter) is a key component of the micro-thermophotovoltaic (TPV)
system. An experimental study on the wall temperature and radiation power through the wall …

In this paper, a 6 R linkage suitable as a building block for the construction of large
deployable structures is presented. First, we report the possibility of construct an extended 5 …

We experimentally investigate the feasibility of a 500-W class ultra-micro gas turbine power
generator. System specifications include a design rotational speed of 400,000 rpm, a …