Density-tapered spiral arrays for ultrasound 3-D imaging
The current high interest in 3-D ultrasound imaging is pushing the development of 2-D
probes with a challenging number of active elements. The most popular approach to limit …
probes with a challenging number of active elements. The most popular approach to limit …
Material structure and mechanical properties of silicon nitride and silicon oxynitride thin films deposited by plasma enhanced chemical vapor deposition
Z Gan, C Wang, Z Chen - Surfaces, 2018 - mdpi.com
Silicon nitride and silicon oxynitride thin films are widely used in microelectronic fabrication
and microelectromechanical systems (MEMS). Their mechanical properties are important for …
and microelectromechanical systems (MEMS). Their mechanical properties are important for …
[HTML][HTML] Quantitative comparison of PZT and CMUT probes for photoacoustic imaging: Experimental validation
Photoacoustic (PA) signals are short ultrasound (US) pulses typically characterized by a
single-cycle shape, often referred to as N-shape. The spectral content of such wideband …
single-cycle shape, often referred to as N-shape. The spectral content of such wideband …
Development of MEMS MOS gas sensors with CMOS compatible PECVD inter-metal passivation
Metal oxide semiconductor (MOS) based micro-electromechanical sensors (MEMS) for gas
measurement were developed using back-end-of-line (BEOL) compatible inter-metal …
measurement were developed using back-end-of-line (BEOL) compatible inter-metal …
Thin film encapsulation for RF MEMS in 5G and modern telecommunication systems
In this work, SiNx/a-Si/SiNx caps on conductive coplanar waveguides (CPWs) are proposed
for thin film encapsulation of radio-frequency microelectromechanical systems (RF MEMS) …
for thin film encapsulation of radio-frequency microelectromechanical systems (RF MEMS) …
Silicon nitride films fabricated by a plasma-enhanced chemical vapor deposition method for coatings of the laser interferometer gravitational wave detector
HW Pan, LC Kuo, SY Huang, MY Wu, YH Juang… - Physical Review D, 2018 - APS
Silicon is a potential substrate material for the large-areal-size mirrors of the next-generation
laser interferometer gravitational wave detector operated in cryogenics. Silicon nitride thin …
laser interferometer gravitational wave detector operated in cryogenics. Silicon nitride thin …
Adapting the electron beam from SEM as a quantitative heating source for nanoscale thermal metrology
The electron beam (e-beam) in the scanning electron microscopy (SEM) provides an
appealing mobile heating source for thermal metrology with spatial resolution of∼ 1 nm, but …
appealing mobile heating source for thermal metrology with spatial resolution of∼ 1 nm, but …
Graphene acoustic transducers based on electromagnetic interactions
X Guo, J An, H Wu, Z Cai, P Wang - Ultrasonics, 2021 - Elsevier
Graphene acoustic transducers have high sensitivity in receiving mode. However, they are
used in transmitting mode with low radiation performance. A graphene acoustic transducer …
used in transmitting mode with low radiation performance. A graphene acoustic transducer …
Thermal annealing of thin PECVD silicon-oxide films for airgap-based optical filters
M Ghaderi, G De Graaf… - … of Micromechanics and …, 2016 - iopscience.iop.org
This paper investigates the mechanical and optical properties of thin PECVD silicon-oxide
layers for optical applications. The different deposition parameters in PECVD provide a …
layers for optical applications. The different deposition parameters in PECVD provide a …
Fabrication and characterization of a high frequency and high coupling coefficient CMUT array
R Manwar, T Simpson, A Bakhtazad… - Microsystem …, 2017 - Springer
Fabrication and initial measurement results of a bisbenzocyclobutene (BCB) based
capacitive micromachined ultrasonic transducer (CMUT) linear phased array has been …
capacitive micromachined ultrasonic transducer (CMUT) linear phased array has been …