Tunable micro-and nanomechanical resonators

WM Zhang, KM Hu, ZK Peng, G Meng - Sensors, 2015 - mdpi.com
Advances in micro-and nanofabrication technologies have enabled the development of
novel micro-and nanomechanical resonators which have attracted significant attention due …

Thermal tuning of mechanical nonlinearity in GaAs doubly-clamped MEMS beam resonators

Y Zhang, Y Yoshioka, M Iimori, B Qiu, X Liu… - Applied Physics …, 2021 - pubs.aip.org
We report the thermal tuning of the mechanical nonlinearity in GaAs double-clamped MEMS
beam resonators for sensitive thermal sensing applications. We have estimated the …

Surface roughness effects on the frequency tuning performance of a nanoelectromechanical resonator

HS Yoon, B Park, SC Jun - Nanoscale Research Letters, 2013 - Springer
Electrothermal heating is one of radio frequency tuning method in nanoelectromechanical
resonators with magnetomotive transduction. This study confirmed that the surface …

Magnetomotive and tension-based tuning of a micromechanical resonator

M Bicer, AD Yalcinkaya, BE Alaca - Proceedings, 2017 - mdpi.com
Bidirectional frequency tuning in microresonators is demonstrated through the simultaneous
use of both mechanical (stretching) and magnetomotive approaches. Stretching is employed …

[PDF][PDF] PLEASE CITE THIS ARTICLE AS DOI: 10.1063/5.0065271

Y Zhang, Y Yoshioka, M Iimori, B Qiu, X Liu… - researchgate.net
Microelectromechanical-system (MEMS) resonators1-3 are promising candidates for
highsensitivity sensing and compact timing devices. MEMS resonators give mechanical …

Mechanical properties changes during electrothermal RF tuning in a nanoelectromechanical resonator

HS Yoon, B Park, JH Cho… - IEEE transactions on …, 2013 - ieeexplore.ieee.org
This paper demonstrates the electrothermal tuning of a nanoelectromechanical resonator
correlated with the mechanical properties of an Al/SiC bilayer beam structure at radio …