Thermal tuning of mechanical nonlinearity in GaAs doubly-clamped MEMS beam resonators
We report the thermal tuning of the mechanical nonlinearity in GaAs double-clamped MEMS
beam resonators for sensitive thermal sensing applications. We have estimated the …
beam resonators for sensitive thermal sensing applications. We have estimated the …
Surface roughness effects on the frequency tuning performance of a nanoelectromechanical resonator
Electrothermal heating is one of radio frequency tuning method in nanoelectromechanical
resonators with magnetomotive transduction. This study confirmed that the surface …
resonators with magnetomotive transduction. This study confirmed that the surface …
Magnetomotive and tension-based tuning of a micromechanical resonator
Bidirectional frequency tuning in microresonators is demonstrated through the simultaneous
use of both mechanical (stretching) and magnetomotive approaches. Stretching is employed …
use of both mechanical (stretching) and magnetomotive approaches. Stretching is employed …
[PDF][PDF] PLEASE CITE THIS ARTICLE AS DOI: 10.1063/5.0065271
Microelectromechanical-system (MEMS) resonators1-3 are promising candidates for
highsensitivity sensing and compact timing devices. MEMS resonators give mechanical …
highsensitivity sensing and compact timing devices. MEMS resonators give mechanical …
Mechanical properties changes during electrothermal RF tuning in a nanoelectromechanical resonator
This paper demonstrates the electrothermal tuning of a nanoelectromechanical resonator
correlated with the mechanical properties of an Al/SiC bilayer beam structure at radio …
correlated with the mechanical properties of an Al/SiC bilayer beam structure at radio …