This paper presents the design and application of a lever coupling mechanism to improve
the shock resistance of a dual-mass silicon micro-gyroscope with drive mode coupled along …

This paper presents the design and implementation of a dual-mass MEMS gyroscope with
high shock resistance by improving the in-phase frequency of the gyroscope and by using a …

This paper introduces the configuration of the MEMS tuning fork gyroscope with the
connecting diamond-shaped frame to achieve the anti-phase mode in the driving direction …

We report an integrated micro-actuator for independent control of the displacement in three
orthogonal directions. Electrostatic comb drives are employed for controlling the …

This paper reports a MEMS tuning fork gyroscope which can effectively reduce the
acceleration output in both drive and sense directions. The structure adjusts the order of …

In this paper, a spring system symmetrically arranged around a circular plate compliant to
out-of-plane oscillation is proposed. The spring system consists of single serpentine springs …

Microelectromechanical system (MEMS) is a technology that combines microelectronic
system and a micromechanical system. The MEMS tuning fork gyroscope is made up of two …

Parallel robots have some advantages in comparison with serial robots that they are light
compact structures, high rigidity, and good distribution of force. Therefore, parallel robots …

This paper presents a new coupling spring design for the MEMS tuning fork structure. The
spring design incorporates the outer arm, inner arm, and torsional arm. The outer and inner …

We report an integrated micro-actuator for independent control of the displacement in three
orthogonal directions. Electrostatic comb drives are employed for controlling the displace …