Solid-State Dewetting Structure and Properties Evolution of Pt Films Deposited by Physical Vapour Deposition During Heat Treatment
W Chen, Y Feng, P Wang, Q Cui, Z Qiang… - Available at SSRN … - papers.ssrn.com
To investigate the correlation between microstructure and thermal stability of Pt film, Pt films
were prepared by magnetron sputtering with thicknesses of 50, 200 and 400nm, respectively …
were prepared by magnetron sputtering with thicknesses of 50, 200 and 400nm, respectively …