The vast development of nanofabrication has spurred recent progress for the manipulation
of light down to a region much smaller than the wavelength. Metallic plasmonic array …

There is an astonishing number of optoelectronic, photonic, biological, sensing, or storage
media devices, just to name a few, that rely on a variety of extraordinary periodic surface …

The development of reliable, mass-produced, and cost-effective sub-10 nm nanofabrication
technology leads to an unprecedented level of integration of photonic devices. In this work …

The field of optical lithography is subject to intense research and has gained enormous
improvement. However, the effort necessary for creating structures at the size of 20 nm and …

Two-photon polymerization (TPP) processes have enabled the fabrication of advanced and
functional microstructures. However, most TPP platforms are bulky and require the use of …

The SbTe thin film is a promising heat-mode resist for direct laser writing nanolithography
owing to the simple fabrication procedure and clear phase change thermal threshold …

Ge2Sb2Te5 thin film is investigated as a positive heat‐mode resist and environmentally
friendly FeCl3 solution is as means an efficient developer. The corrosion selectivity of …

摘要现有主流光刻技术与设备变得越来越复杂的原因之一在于其仍然囿于线性光学光刻范畴,
未能突破光学衍射极限, 是衍射极限附近的光刻技术. 采用紫外, 可见或近红外等长波长光源进行 …

Additive manufacturing of sophisticated 3D nanoscale objects commonly uses femtosecond
lasers to photopolymerize a light‐sensitive resin using multi‐photon absorption. This …

Cells in vivo are grown in a highly organized environment defined by the interactions with
other cells and the extracellular matrix proteins. Thus, in order to shed light in cellular …