Laser scanning patterns induced surface properties variations of Ti-V-Hf-Zr non-evaporable getter film with 316L stainless steel substrates

Q Si, J Wang, T Wu, K Yigit, Q Sun, Y Zhang, Z Li, H Wu… - Vacuum, 2024 - Elsevier
The effects of laser treatment scanning patterns on the properties of Ti-V-Hf-Zr non-
evaporable getter (NEG) film on 316L stainless steel (316L SS) substrates were analyzed …