This paper is a review of the remarkable progress that has been made during the past few
decades in design, modeling, and fabrication of micromachined resonators. Although micro …

Micromechanical devices comprise emerging sensor platforms with straightforward sensing
mechanisms. Molecular adsorption onto the sensing element, typically a cantilever, shifts its …

A microcantilever is a suspended micro-scale beam structure supported at one end which
can bend and/or vibrate when subjected to a load. Microcantilevers are one of the most …

Building on the invention of the transistor by Brattain and Bardeen, 1 an enormous amount
of research in semiconductors and integrated circuits (ICs) has established the modern …

Nanomechanical resonators have been monolithically integrated on preprocessed
complementary metal-oxide-semiconductor (CMOS) chips. Fabricated resonator systems …

Carbon nanomaterials, such as carbon nanotubes (CNTs), graphene sheets (GSs), and
carbyne, are an important new class of technological materials, and have been proposed as …

Scanning probe microscopy (SPM) comprises a family of techniques that measure surface
topography and properties on the atomic scale. There are an ever increasing number of …

Microelectromechanical sensors have extreme mass sensitivities, making them promising
for mass sensing, gas sensing, and biosensing applications. Despite the numerous …

La litografía por haz de electrones (Electron Beam Lithography, EBL) se ha consolidado
como una de las técnicas más eficaces que permiten definir motivos en el rango …

Rapid detection and identification of pathogenic microorganisms is fundamental to
minimizing the spread of infectious disease, and informing clinicians on patient treatment …