Micromachined resonators: A review

R Abdolvand, B Bahreyni, JEY Lee, F Nabki - Micromachines, 2016 - mdpi.com
This paper is a review of the remarkable progress that has been made during the past few
decades in design, modeling, and fabrication of micromachined resonators. Although micro …

Microcantilevers: sensing chemical interactions via mechanical motion

KM Goeders, JS Colton, LA Bottomley - Chemical reviews, 2008 - ACS Publications
Micromechanical devices comprise emerging sensor platforms with straightforward sensing
mechanisms. Molecular adsorption onto the sensing element, typically a cantilever, shifts its …

Microcantilever: Dynamical response for mass sensing and fluid characterization

J Mouro, R Pinto, P Paoletti, B Tiribilli - Sensors, 2020 - mdpi.com
A microcantilever is a suspended micro-scale beam structure supported at one end which
can bend and/or vibrate when subjected to a load. Microcantilevers are one of the most …

Chemical sensors with integrated electronics

S Joo, RB Brown - Chemical reviews, 2008 - ACS Publications
Building on the invention of the transistor by Brattain and Bardeen, 1 an enormous amount
of research in semiconductors and integrated circuits (ICs) has established the modern …

Ultrasensitive mass sensor fully integrated with complementary metal-oxide-semiconductor circuitry

E Forsen, G Abadal, S Ghatnekar-Nilsson… - Applied Physics …, 2005 - pubs.aip.org
Nanomechanical resonators have been monolithically integrated on preprocessed
complementary metal-oxide-semiconductor (CMOS) chips. Fabricated resonator systems …

Review on carbon nanomaterials-based nano-mass and nano-force sensors by theoretical analysis of vibration behavior

JX Shi, XW Lei, T Natsuki - Sensors, 2021 - mdpi.com
Carbon nanomaterials, such as carbon nanotubes (CNTs), graphene sheets (GSs), and
carbyne, are an important new class of technological materials, and have been proposed as …

Scanning probe microscopy

MA Poggi, ED Gadsby, LA Bottomley, WP King… - Analytical …, 2004 - ACS Publications
Scanning probe microscopy (SPM) comprises a family of techniques that measure surface
topography and properties on the atomic scale. There are an ever increasing number of …

Thin-film silicon MEMS for dynamic mass sensing in vacuum and air: Phase noise, allan deviation, mass sensitivity and limits of detection

RMR Pinto, P Brito, V Chu… - Journal of …, 2019 - ieeexplore.ieee.org
Microelectromechanical sensors have extreme mass sensitivities, making them promising
for mass sensing, gas sensing, and biosensing applications. Despite the numerous …

[图书][B] Electron beam lithography for nanofabrication

G Rius - 2008 - ddd.uab.cat
La litografía por haz de electrones (Electron Beam Lithography, EBL) se ha consolidado
como una de las técnicas más eficaces que permiten definir motivos en el rango …

Application of nanotechnology in biosensors for enhancing pathogen detection

AJ Sposito, A Kurdekar, J Zhao… - Wiley Interdisciplinary …, 2018 - Wiley Online Library
Rapid detection and identification of pathogenic microorganisms is fundamental to
minimizing the spread of infectious disease, and informing clinicians on patient treatment …