MEMS switch is a movable device manufactured by means of semiconductor technology,
possessing many incomparable advantages such as a small volume, low power …

This paper presents a dynamic model and design analysis for V-and Z-shaped
electrothermal microactuators operating in vacuum and in air conditions. The model is …

This paper proposes an electro-thermal modeling on multilayered metallic microstructures
that are able to deploy vertically when thermally actuated. A typical design of such …

This paper reports a microelectromechanical systems (MEMS) based XY-stage integrating
compliant motion amplification mechanism for nanopositioning at sub nanometer resolution …

This paper presents a novel two-row interdigitating-finger repulsive-torque electrostatic
actuator and its application to the micromirror vector display. The actuator consists of upper …

This paper presents a stiffness-based kinematic model for analysis and control of a Micro-
Electro-Mechanical Systems (MEMS) flexure-based hexapod nanopositioner that was …

This paper presents current divisions and distributed Joule heating of two-dimensional (2D)
grid microstructures. The current divisions on 2× 2, 4× 4, and n× n grid microstructures made …

A new design of three degrees-of-freedom (DOF) translational motion stage (XYZ stage) is
presented in this paper. This XYZ stage is based on MEMS and designed by combining …

This paper presents an analytical model for calculating the workspace of a flexure-based
hexapod nanopositioner previously built by the National Institute of Standards and …

In this paper, a capacitive RF MEMS switch working in shunt configuration is designed and
optimized using FEM software. An electrostatically actuated fixed–fixed type shunt switch is …