Design, modeling and control of high-bandwidth nano-positioning stages for ultra-precise measurement and manufacturing: a survey

WW Huang, X Wang, Y Meng, L Li… - … Journal of Extreme …, 2024 - iopscience.iop.org
High-bandwidth nano-positioning stages (NPSs) have boosted the advancement of modern
ultra-precise, ultra-fast measurement and manufacturing technologies owing to their fast …

Design and experimental investigation of a novel compliant positioning stage with low-frequency vibration isolation capability

X Sun, Z Wang, Y Yang - Sensors and Actuators A: Physical, 2019 - Elsevier
Nowadays, those compliant positioning stages with the advantages of compact structure,
micro-displacement output precision and negligible friction have been widely used in ultra …

Integrated design, fabrication, and experimental study of a parallel micro-nano positioning-vibration isolation stage

X Sun, B Yang, Y Gao, Y Yang - Robotics and Computer-Integrated …, 2020 - Elsevier
Positioning and vibration isolation are two important steps for sensitive payloads to realize
precision observation in space environment. However, current base stages applied to …

Dual multi-objective optimization design method for compliant guide mechanism

Z Sun, C Zheng, X Sun, X Hou, Y Yang - Structural and Multidisciplinary …, 2024 - Springer
In this paper, a dual multi-objective optimization design method for compliant mechanism is
proposed, and a new compliant guide mechanism is designed by using this method. The …

Improved Adaptive Filter-Based Control of a Magnetostrictive Vibration Isolator

S Yi, B Yang, G Meng - 2018 37th Chinese Control Conference …, 2018 - ieeexplore.ieee.org
In this paper, an improved adaptive filtered-x normalized least-mean-square (FxNLMS)
algorithm is proposed to achieve active microvibration isolation. A developed …

A Novel Giant Magnetostrictive Driven-Vibration Isolation Stage Based on Compliant Mechanism

X Sun, J Hu, J Lu, Z Wang - … , ICIRA 2019, Shenyang, China, August 8–11 …, 2019 - Springer
For aim of providing a stable working environment for those sensitive payloads on-orbit,
typically the space telescope and laser communication equipment and so on, micro …