Deformations of Single-Crystal Silicon Circular Plate: Theory and Experiment
In this paper, the experimental methodology for the single-crystal circular plate deformation
measurement and subsequent procedure for the quantitation of its mechanical properties …
measurement and subsequent procedure for the quantitation of its mechanical properties …
Simulation of a Sensitive Element of a MEMS-based Pressure Sensor Operating on The Thermal Detection Principle
GD Demin, NA Djuzhev… - 2021 IEEE 22nd …, 2021 - ieeexplore.ieee.org
Currently, great interest of the scientific community is attracted to the creation of miniature
and highly sensitive pressure sensors, which is associated with their demand in a wide …
and highly sensitive pressure sensors, which is associated with their demand in a wide …
Mechanical Stresses Analysis of Thin Round Membranes in the Case of Large Deflections
AA Dedkova, PY Glagolev, GD Demin… - … IEEE Conference of …, 2020 - ieeexplore.ieee.org
An analysis of the methods for calculating the dependence of the deflection of multilayer
round membranes on the applied overpressure was carried out. To compare theoretical …
round membranes on the applied overpressure was carried out. To compare theoretical …