Vapor phase infiltration (VPI) for transforming polymers into organic–inorganic hybrid materials: a critical review of current progress and future challenges

CZ Leng, MD Losego - Materials Horizons, 2017 - pubs.rsc.org
This review critically assesses the state-of-knowledge for vapor phase infiltration (VPI)
processing science, an emerging gas phase processing scheme for producing organic …

Hybrid nanomaterials through molecular and atomic layer deposition: Top down, bottom up, and in-between approaches to new materials

K Gregorczyk, M Knez - Progress in Materials Science, 2016 - Elsevier
The ability to produce or alter materials to obtain drastically different or improved properties
has been the driving goal of materials science since its inception. Combining multiple …

Resist hardening and development processes for semiconductor device manufacturing

P Xie, CD Bencher, H Dai, T Michaelson… - US Patent …, 2016 - Google Patents
In some embodiments, a method of forming an etch mask on a Substrate is provided that
includes (1) forming a resist layer on a Substrate;(2) exposing one or more regions of the …

Bit-patterned magnetic recording: Theory, media fabrication, and recording performance

TR Albrecht, H Arora… - IEEE Transactions …, 2015 - ieeexplore.ieee.org
Bit-patterned media (BPM) for magnetic recording provides a route to thermally stable data
recording at> 1 Tb/in 2 and circumvents many of the challenges associated with extending …

[PDF][PDF] Sequential infiltration synthesis of doped polymer films with tunable electrical properties for efficient triboelectric nanogenerator development

Y Yu, Z Li, Y Wang, S Gong… - Advanced …, 2015 - nanoscience.engr.wisc.edu
Atomic layer deposition (ALD) is a powerful thin film growth technique on the basis of
sequential self-limiting surface reactions.[24, 25] When implemented to certain polymer …

[HTML][HTML] The chemical physics of sequential infiltration synthesis—A thermodynamic and kinetic perspective

RZ Waldman, DJ Mandia, A Yanguas-Gil… - The Journal of …, 2019 - pubs.aip.org
Sequential infiltration synthesis (SIS) is an emerging materials growth method by which
inorganic metal oxides are nucleated and grown within the free volume of polymers in …

Strategies for inorganic incorporation using neat block copolymer thin films for etch mask function and nanotechnological application

C Cummins, T Ghoshal, JD Holmes… - Advanced …, 2016 - Wiley Online Library
Block copolymers (BCPs) and their directed self‐assembly (DSA) has emerged as a
realizable complementary tool to aid optical patterning of device elements for future …

Three-dimensional nanoscale metal, metal oxide, and semiconductor frameworks through DNA-programmable assembly and templating

A Michelson, A Subramanian, K Kisslinger… - Science …, 2024 - science.org
Controlling the three-dimensional (3D) nanoarchitecture of inorganic materials is imperative
for enabling their novel mechanical, optical, and electronic properties. Here, by exploiting …

Fabrication of nanoporous alumina ultrafiltration membrane with tunable pore size using block copolymer templates

C Zhou, T Segal‐Peretz, ME Oruc… - Advanced Functional …, 2017 - Wiley Online Library
Control over nanopore size and 3D structure is necessary to advance membrane
performance in ubiquitous separation devices. Here, inorganic nanoporous membranes are …

Atomic layer deposition for membrane interface engineering

HC Yang, RZ Waldman, Z Chen, SB Darling - Nanoscale, 2018 - pubs.rsc.org
In many applications, interfaces govern the performance of membranes. Structure,
chemistry, electrostatics, and other properties of interfaces can dominate the selectivity, flux …