High aspect ratio silicon etch: A review
B Wu, A Kumar, S Pamarthy - Journal of applied physics, 2010 - pubs.aip.org
High aspect ratio (HAR) silicon etch is reviewed, including commonly used terms, history,
main applications, different technological methods, critical challenges, and main theories of …
main applications, different technological methods, critical challenges, and main theories of …
Process in micro-combustion and energy conversion of micro power system: A review
E Jiaqiang, J Ding, J Chen, G Liao, F Zhang… - Energy Conversion and …, 2021 - Elsevier
Hydrocarbon fuel and hydrogen are used as fuels for micro power equipment to replace
traditional batteries and provide energy for micro-electromechanical systems, which has …
traditional batteries and provide energy for micro-electromechanical systems, which has …
A review on microcombustion: Fundamentals, devices and applications
NS Kaisare, DG Vlachos - Progress in Energy and Combustion Science, 2012 - Elsevier
Microcombustion research has flourished over the past decade. Yet, most of the commercial
potential of microcombustion is still to come. Aside from portable electronics, emerging …
potential of microcombustion is still to come. Aside from portable electronics, emerging …
[图书][B] Chemical micro process engineering: fundamentals, modelling and reactions
A MULTI-FACETED, HIERARCHIC ANALYSIS OF CHEMICAL MICRO PROCESS
TECHNOLOGY Micro Reactor Differentiation and Process Intensification Consequences of …
TECHNOLOGY Micro Reactor Differentiation and Process Intensification Consequences of …
Advances and challenges in the development of power-generation systems at small scales
DC Walther, J Ahn - Progress in Energy and Combustion Science, 2011 - Elsevier
The miniaturization of electro-mechanical devices, and the resulting need for micro-power
generation (milliwatts to watts) with low weight, long life devices, has lead to the recent …
generation (milliwatts to watts) with low weight, long life devices, has lead to the recent …
Millimeter-scale, micro-electro-mechanical systems gas turbine engines
AH Epstein - J. Eng. Gas Turbines Power, 2004 - asmedigitalcollection.asme.org
The confluence of market demand for greatly improved compact power sources for portable
electronics with the rapidly expanding capability of micromachining technology has made …
electronics with the rapidly expanding capability of micromachining technology has made …
A six-wafer combustion system for a silicon micro gas turbine engine
As part of a program to develop a micro gas turbine engine capable of producing 10-50 W of
electrical power in a package less than one cubic centimeter in volume, we present the …
electrical power in a package less than one cubic centimeter in volume, we present the …
Millimeter-scale, MEMS gas turbine engines
AH Epstein - Turbo Expo: Power for Land, Sea, and …, 2003 - asmedigitalcollection.asme.org
The confluence of market demand for greatly improved compact power sources for portable
electronics with the rapidly expanding capability of micromachining technology has made …
electronics with the rapidly expanding capability of micromachining technology has made …
Fracture strength of micro-and nano-scale silicon components
Silicon (Si) microfabrication techniques, derived from the microelectronics industry, have
enabled the development and commercialization of microelectromechanical systems …
enabled the development and commercialization of microelectromechanical systems …
A numerical study on premixed micro-combustion of CH4–air mixture: Effects of combustor size, geometry and boundary conditions on flame temperature
A numerical study on CH4–air premixed combustion in micro-combustors was undertaken
by solving the 2D governing equations. The effects of combustor size and geometry, inlet …
by solving the 2D governing equations. The effects of combustor size and geometry, inlet …