Today, the vast majority of microelectromechanical system (MEMS) sensors are
mechanically rigid and therefore suffer from disadvantages when used in intimately …

Capacitive technology allows building sensors that are small, compact and have high
sensitivity. For this reason it has been widely adopted in robotics. In a previous work we …

This experimental study presents the operation of pressure sensors made from low-
temperature flexible substrates. Design, simulation, fabrication, and characterization are …

MEMS force sensors embedded in flexible polyimide substrates are reported, motivated by
the need to monitor force and pressure on nonplanar surfaces for structural health …

This paper reviews the most recent results on the fabrication and characterization of a
variety of microelectromechanical (MEMS) based sensors fabricated on flexible polymer …

This paper describes the fabrication and characterization of micromachined, piezoresistive,
absolute pressure sensors sandwiched between a flexible polyimide. The sensors are …

If a pair of MEMS resonators is electrostatically coupled together, the vibration amplitude
ratios at the resonant frequencies of the resulting coupled system are sensitive to stiffness …

MEMS sensors on flexible substrates were developed and fabricated utilizing conventional
lithography, deposition and etching tools. All of these sensors were fabricated in a MESA …

In the current paper, we report the 1/f noise measurement of nichrome Ni/Cr (80/20%) thin
films for two types of pressure sensors: relative pressure sensors and absolute pressure …

This report is aimed to introduce the concept of a biomimetic skin-type tactile sensor
assembly comparable to human skin through the engineering analysis of sensing …