In the past two decades, miniature mass spectrometers have developed rapidly as the
requirements of on-site detection have been growing continuously. At present, it seems that …

This study reviews major sensing technologies for the Lunar environment and its resources,
as they have been developed since the times of Apollo missions. Selected technologies of …

In the article a miniature MEMS-type ion-sorption vacuum pump has been presented. The
influence of electric and magnetic field, as well as horizontal and vertical dimensions of the …

The high-vacuum self-pumping MEMS cell for atomic spectroscopy presented here is the
result of the technological achievements of the author and the research group in which he …

A concept of a miniaturized microelectromechanical system based transmission electron
microscope is presented. This device consists of two parts: part 1—electron optics column …

This paper presents the concept of a MEMS mass spectrometer, which integrates all
necessary modules on single vacuum-sealed chip. Computer simulations and preliminary …

Mass spectrometry is one of the most powerful techniques that allows qualitative and
quantitative characterization of chemical compounds. However, bulky high vacuum system …

For more than a decade we have been observing the significant growth in an electron
source development for the vacuum nanoelectronics. Here, we discuss the progress in the …