Macro-scale, hemispherical-shaped resonating gyroscopes are used in high-precision
motion and navigation applications. In these gyroscopes, a 3D wine-glass, hemispherical …

Presents the mathematical framework, technical language, and control systems know-how
needed to design, develop, and instrument micro-scale whole-angle gyroscopes This …

In this paper, we report Q-factor over 1 million on both n= 2 wineglass modes, and high-
frequency symmetry (Af/f) of 132 ppm on wafer-level microglassblown 3-D fused silica …

We demonstrate, for the first time, sub-1 Hz frequency symmetry in micro-glassblown
wineglass resonators with integrated electrode structures. A new fabrication process based …

This paper presents a new and simple microfabrication process for creating various 3-D
microstructures with high-aspect ratios. The key feature of this process is the use of a blow …

In this paper, recent developments in the design and fabrication of micromachined fused
quartz hemi-toroidal shells are presented. The fabrication is based on micro glassblowing …

Due to the micro hemisphere structure's small anchor point area, the micro hemisphere
resonator and the Pyrex7740 glass electrode substrate are prone to tilt during the assembly …

We report on a new design approach for XY symmetric resonator, emphasizing the increase
in symmetry by localization of the device anchors. The resonator is mechanized as a z-axis …

Metal coating of Fused Silica (FS) Micro-machined Hemispherical Resonator Gyroscopes
(micro-HRGs) is necessary to allow for capacitive actuation and detection of motion …

This paper addresses the impact of cubic nonlinearity on the operation of a rate-integrating
gyroscope (RIG). It is demonstrated that below the bifurcation threshold, cubic nonlinearity …