Fabrication of planar optical waveguides by 6.0 MeV silicon ion implantation in Nd-doped phosphate glasses
XL Shen, HQ Dai, LL Zhang, Y Wang… - Japanese Journal of …, 2018 - iopscience.iop.org
We report the fabrication of a planar optical waveguide by silicon ion implantation into Nd-
doped phosphate glass at an energy of 6.0 MeV and a dose of 5.0× 10 14 ions/cm 2. The …
doped phosphate glass at an energy of 6.0 MeV and a dose of 5.0× 10 14 ions/cm 2. The …