Microcantilevers were first introduced as imaging probes in Atomic Force Microscopy (AFM)
due to their extremely high sensitivity in measuring surface forces. The versatility of these …

By virtue of a great progress of semiconductor fabrication technologies, micro electro‐
mechanical systems (MEMS) have been developed for a wide variety of industries. For …

The power generated by flexible wearable devices (FWDs) is normally insufficient to
eradicate bacteria, and many conventional antibacterial strategies are also not suitable for …

This paper presents an mN-level contact and restoring force RF microelectromechanical
systems metal-contact switch exhibiting high reliability, high linearity, and high power …

A review on the mechanical characterization of materials at small length scale is presented.
The focus is on the different micro-and nanoscale testing techniques, the variety of materials …

While all that glitters may not be gold, it is the most beautiful of all the elements in their pure
form. The name gold comes from the Old English Anglo-Saxon word for geolo meaning" …

A new simple closed-form equation that accurately predicts the effect of an arbitrarily large
constant axial load, residual stress or temperature shift on the natural frequencies of an …

In this paper we present a 3D nonlinear dynamic model which describes the transient
mechanical analysis of an ohmic contact RF MEMS switch, using finite element analysis in …

This paper presents the design and characterization of compact high-power RF
microelectromechanical system single-pole single-throw (SPST) and single-pole four-throw …

Material properties of atomic layer deposited (ALD) thin films are of interest for applications
ranging from wear resistance to high-k dielectrics in electronic circuits. We demonstrate the …