Plasma produced from molten-tin microdroplets generates extreme ultraviolet light for state-
of-the-art nanolithography. Currently, CO 2 lasers are used to drive the plasma. In the future …

The 13.5-nm extreme ultraviolet (EUV) light radiated by laser-produced tin droplet plasma is
successfully used in manufacturing integrated circuits with critical dimensions (CDs) below 7 …

We experimentally and numerically investigate the early-time hydrodynamic response of tin
microdroplets driven by a ns-laser-induced plasma. Experimentally, we use stroboscopic …

We present results from a combined experimental and numerical simulation study of the
anisotropy of the expansion of a laser-produced plasma into vacuum. Plasma is generated …

We experimentally study the mass partitioning of a fragmenting liquid sheet formed after the
impact of a ns-laser pulse on a tin microdroplet, and its dependence on laser pulse energy …

The emission properties of tin plasmas, produced by the irradiation of preformed liquid tin
targets by several-ns-long 2 µm-wavelength laser pulses, are studied in the extreme …

We introduce a spectroscopic absorption imaging method in the UV regime (225–400 nm) to
study tin vapor created by irradiating a thin film with a low intensity 10 8 W cm− 2 …

We experimentally investigate the speed of fragments produced by ligament breakup in the
laser-induced deformation of tin microdroplets into axisymmetric sheets. The experiments …

We present a method to obtain the individual charge-state-dependent kinetic-energy
distributions of tin ions emanating from a laser-produced plasma from their joint overlapping …

We present a calibrated spectrum in the 5.5–265.5 nm range from a microdroplet-tin Nd:
YAG-laser-produced plasma under conditions relevant for the production of extreme …