Scheduling cluster tools in semiconductor manufacturing: Recent advances and challenges
Cluster tools are automated robotic manufacturing systems containing multiple computer-
controlled process modules. They have been increasingly used for wafer fabrication. This …
controlled process modules. They have been increasingly used for wafer fabrication. This …
IoT-enabled real-time production performance analysis and exception diagnosis model
The recent developments of technologies in Internet of Things (IoT) provide the opportunities
for smart manufacturing with real-time traceability, visibility, and interoperability in production …
for smart manufacturing with real-time traceability, visibility, and interoperability in production …
Compact supervisory control of discrete event systems by Petri nets with data inhibitor arcs
YF Chen, ZW Li, K Barkaoui, NQ Wu… - IEEE Transactions on …, 2016 - ieeexplore.ieee.org
This work proposes a novel structure in Petri nets, namely data inhibitor arcs, and their
application to the optimal supervisory control of Petri nets. A data inhibitor arc is an arc from …
application to the optimal supervisory control of Petri nets. A data inhibitor arc is an arc from …
Optimal one-wafer cyclic scheduling and buffer space configuration for single-arm multicluster tools with linear topology
This work studies the scheduling problem of a single-arm multicluster tool with a linear
topology and process-bound bottleneck individual tool. The objective is to find a one-wafer …
topology and process-bound bottleneck individual tool. The objective is to find a one-wafer …
Scheduling of single-arm cluster tools for an atomic layer deposition process with residency time constraints
In semiconductor manufacturing, there are wafer fabrication processes with wafer revisiting.
Some of them must meet wafer residency time constraints. Taking atomic layer deposition …
Some of them must meet wafer residency time constraints. Taking atomic layer deposition …
Polynomial approach to optimal one-wafer cyclic scheduling of treelike hybrid multi-cluster tools via Petri nets
A treelike hybrid multi-cluster tool is composed of both single-arm and dual-arm cluster tools
with a treelike topology. Scheduling such a tool is challenging. For a hybrid treelike multi …
with a treelike topology. Scheduling such a tool is challenging. For a hybrid treelike multi …
Petri net modeling and scheduling of a close-down process for time-constrained single-arm cluster tools
In wafer fabrication, a robotic cluster tool is required to be closed down in order for
engineers to perform its on-demand and preventive maintenance and switch between …
engineers to perform its on-demand and preventive maintenance and switch between …
[HTML][HTML] Scheduling robotic cells with fixed processing times or time windows: Classification, solution approaches, polynomial algorithms and complexity
Robotic cell scheduling has received considerable attention from researchers. Several
existing review papers have presented then-existing studies on robotic cell scheduling and …
existing review papers have presented then-existing studies on robotic cell scheduling and …
Noncyclic scheduling of cluster tools with a branch and bound algorithm
Cluster tools, each of which consists of multiple processing modules, one material handling
robot, and loadlocks, are widely used for wafer fabrication processes, such as lithography …
robot, and loadlocks, are widely used for wafer fabrication processes, such as lithography …
E-net modeling and analysis of emergency response processes constrained by resources and uncertain durations
Time and resource management and optimization are two important challenges for an
emergency response process, by which all individuals and groups manage hazards in an …
emergency response process, by which all individuals and groups manage hazards in an …