The gas temperature in non-equilibrium plasmas is often obtained from the plasma-induced
emission by measuring the rotational temperature of a diatomic molecule in its excited state …

The physical and chemical aspects of plasma–surface interaction in high-power impulse
magnetron sputtering (HiPIMS) discharges are overviewed. The data obtained by various …

We demonstrate a new technique for frequency-swept laser operation--Fourier domain
mode locking (FDML)--and its application for swept-source optical coherence tomography …

Over the past few decades many diagnostics have been developed to study the non-
equilibrium nature of plasma. These developments have given experimentalists the …

We demonstrate high resolution, three-dimensional OCT imaging with a high speed,
frequency swept 1300 nm laser source. A new external cavity semiconductor laser design …

In this paper, an open-air argon plasma plume is generated at atmospheric pressure by a
two-electrode jet device with sub-microsecond voltage pulses at a repetitive frequency of 1 …

Inductively coupled plasma (ICP) reactors are widely used for microelectronic device
fabrication. Numerical simulations of these devices are an important tool, which enables an …

A global (volume averaged) model is developed for a nitrogen discharge in the steady state
for the pressure range 1–100 mTorr. The electron energy distribution function is allowed to …

Neutral gas temperature (T g) is measured in an industrial high-density inductively coupled
etch reactor operating in CF 4⁠, SF 6⁠, O 2⁠, Cl 2⁠, or HBr plasmas. Two laser diodes are …

This article attempts to review the major advancements made in the past 12 years, since
1993, in the field of diode laser atomic spectroscopy. The discussion covers experimental …